Piezoelectric Film Waveguides for Surface Acoustic Waves
| Authors | M.F. Zhovnir |
| Affiliations | National Technical University of Ukraine "Kyiv Polytechnic Institute" 16/9, Polytechnique st., 03056 Kyiv-56, Ukraine |
| Е-mail | zhovnir101@gmail.com |
| Issue | Volume 8, Year 2016, Number 4 |
| Dates | Received 02 June 2016; revised manuscript received 22 November 2016; published online 29 November 2016 |
| Citation | M.F. Zhovnir, J. Nano- Electron. Phys. 8 No 4(1), 04007 (2016) |
| DOI | 10.21272/jnep.8(4(1)).04007 |
| PACS Number(s) | 77.65.Dq, 64.60.Ej |
| Keywords | Surface acoustic wave (SAW), SAW waveguide and concentrator, Dispersion equation, The dispersion of the phase velocity of the wave, Optical sensing. |
| Annotation | The paper presents results of mathematical modeling of piezoelectric film waveguide structures for surface acoustic waves (SAW). Piezoelectric ZnO film is supposed to be placed on a fused quartz substrate. The analytical ratios and numerical results allow to determine the design parameters of the waveguide structures to provide a single-mode SAW propagation mode. The results of amplitude and phase experimental studies of the SAW in the waveguide structures that were carried out on the laser optical sensing set up confirm the theoretical calculations. |
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