Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO2 Nanoparticles

Authors	V.I. Panfilov¹, M.A. Pugachevskii², A.P. Kuzmenko³ , M.B. Dobromyslov⁴
Affiliations	¹ Far Eastern State Transport University, Khabarovsk, Russia ² Institute of Materials Science, Khabarovsk Scientific Center, FEB RAS, Khabarovsk, Russia ³ Department of Nanotechnology & Engineering Physics, SWSU, Kursk, Russia ⁴ Pacific National University, Khabarovsk, Russia
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Issue	Volume 7, Year 2015, Number 4
Dates	Received 02 October 2015; published online 24 December 2015
Citation	V.I. Panfilov, M.A. Pugachevskii, A.P. Kuzmenko, M.B. Dobromyslov, J. Nano- Electron. Phys. 7 No 4, 04099 (2015)
DOI
PACS Number(s)	61.46.Df, 65.80.-g, 82.60.Qr
Keywords	Laser ablation (2) , Nanoparticles (70) , Hafnium dioxide (2) , High-temperature phase.
Annotation	The influence of the substrate temperature on the formation of high-temperature phases of hafnium dioxide in the process of pulsed laser ablation is investigated. It is established that the HfO2 nanoparticles of the high-temperature tetragonal and cubic phases with a quantitative content up to 50 % are formed on the surface of the substrate at room temperature during the laser ablation with intensity of 1010 W/m2. It is shown that with increasing the substrate temperature the average size of the ablated nanoparticles decreases and the quantitative content of the high-temperature phases is increased up to 70 %.
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