Influence of Order of Double Step Implantation of 64Zn+ and 16O+ Ions into Si on Formation of Zinc-containing Nanoparticles

Authors	K.B. Eidelman¹, K.D. Shcherbachev¹, N.Yu. Tabachkova¹, A.V. Goryachev², D.M. Migunov², D.A. Dronova²
Affiliations	¹ National University of Science and Technology «MISiS» ² National Research University of Electronic Technology (MIET)
Е-mail	eidelman@live.ru
Issue	Volume 7, Year 2015, Number 4
Dates	Received 25 September 2015; published online 10 December 2015
Citation	K.B. Eidelman, K.D. Shcherbachev, N.Yu. Tabachkova, et al., J. Nano- Electron. Phys. 7 No 4, 04028 (2015)
DOI
PACS Number(s)	61.72.Up, 61.72.Yx
Keywords	Zn nanoparticles, Double-step ion implantation, Phase formation.
Annotation	This paper presents the research the formation of zinc-containing nanoparticles (NPs) in Si (001) after double-step hot implantation of 64Zn+ and 16O+ ions. High-resolution Transmission Electron Microscopy (HRTEM) and X-ray Diffraction (XRD) methods were used to study a crystal structure of the samples. Depth profiles of implanted impurity atoms were measured by Secondary Ion Mass Spectrometry (SIMS). Zn NPs with a size of 3 up to 50 nm were found in the implanted samples. Zinc-containing NPs with the size of 5-10 nm were found in the surface layer of as-implanted Si substrates. The effect of the order of implantation on structural defects and the impurity atoms depth profiles is established.
	List of References Full text download English version of article

Other articles from this number

1) Phase Transition of Polariton and Magnetopolariton in Semiconductor Microcavity [04001-1-04001-7]
2) Photoanode Engineering Using TiO2 Nanofibers for Enhancing the Photovoltaic Parameters of Natural Dye Sensitised Solar Cells [04002-1-04002-4]
3) The Analysis of the Structural Parameters of Magnetic Fluids with SAXS and MGA Techniques [04003-1-04003-3]
4) Optimization of Energy Conversion Efficiency Betavoltaic Element Based on Silicon [04004-1-04004-4]
5) The Current-voltage Characteristics Simulation of the Betavoltaic Power Supply [04005-1-04005-4]
6) Thermoelectric Composites on the Base of PbTe with Nanoiclusions of Colloidal Silver [04006-1-04006-4]
7) Development of Two-dimensional Analytical Model According to Polarizing Characteristics of the Raman Ranges at Recognition of Nanoparticles of Silver on Polyester Fibers [04007-1-04007-4]
8) Investigation of Structural, SEM, TEM and Dielectric Properties of BaTiO3 nanoparticles [04008-1-04008-4]
9) Small Angle X-ray Scattering in Nanocomposite: Nanoparticles BaTiO3 with Modified Surface in Polystyrene [04009-1-04009-2]
10) Magnetic and X-ray Studies of Nanodispersed Magnetite Synthesized from Chrome Containing Galvanic Sludge [04010-1-04010-3]
11) Variation in Feed Point within Differed L-Slot Multi-frequency Microstrip Patch [04011-1-04011-6]
12) AFM Calculated Parameters of Morphology Investigation of Spin Coated MZO (M = Al, Sn, Cd, Co) Layers [04012-1-04012-7]
13) Two-dimensional Few-circle Optical Pulses in the Inhomogeneous Environment of Carbon Nanotubes [04013-1-04013-4]
14) Self-assembly and Self-organization Processes of Carbon Nanotubes in the Colloidal Systems [04014-1-04014-3]
15) Surface Activity of Graphite Nanomaterials [04015-1-04015-3]
16) Behavior of Zr1 %Nb Alloy Under Swift Kr Ion and Intense Electron Irradiation [04016-1-04016-7]
17) The Spectral Sensitivity Characteristics Simulation of the Silicon p-i-n-structure with High Resistance [04017-1-04017-2]
18) First Principle Study of Uranium Nitrides UN and UN2 Using DFT and DFT + U [04018-1-04018-5]
19) The Peculiarities of the Influence of the Finite Sizes of a Detail on the Distribution of the Surface Layer Micro-hardness [04019-1-04019-4]
20) Modeling Oscillations of Magnetizable Microdrops [04020-1-04020-4]
21) Quantum Hamiltonian and Spectrum of Schrödinger Equation with Companied Harmonic Oscillator Potential and its Inverse in Both Three Dimensional Non-commutative Real Space and Phase [04021-1-04021-7]
22) Influence of a Transverse Electric Field on the Alternating Currents Rectification Effect in Superstructures with Non-additive Energy Spectrum [04022-1-04022-5]
23) Dimensional Effects in Micro- and Nanostructural Changes in Grain and Intragrained Structure of Steel 45 at Static-pulse Treatment [04023-1-04023-4]
24) Studies on Hall Effect and DC Conductivity Measurements of Semiconductor Thin films Prepared by Chemical Bath Deposition (CBD) method [04024-1-04024-4]
25) An Analysis of the Deposition Process and the Structure of Ferroelectric Langmuir Films of Barium Titanate [04025-1-04025-4]
26) Design Considerations of Structural Parameters in Resonant Tunneling Diode by None-Equilibrium Green Function Method [04026-1-04026-4]
27) The use of Multithreshold Cross Sections for the Image Analysis of the Microstructure Surface [04027-1-04027-9]
28) Application of Ultrasonic Bonding in Leds and Led Lamps Production [04029-1-04029-2]
29) Simulation of Mechanical Properties and Intracellular Pressure of Erythrocyte According to Atomic Force Microscopy [04030-1-04030-4]
30) Filled Aluminosilicate of Dendrimer Morphology Used as Low Temperature Cofired Ceramic in LED Devices and Spacecraft Control Systems [04031-1-04031-4]
31) Development of a Technique of an Analytical Assessment of Crossing of Ellipses of Distribution on Polarizing Raman Ranges at Identification of Nanoparticles of Silver on Polyester Fibers [04032-1-04032-3]
32) The Structure, Composition and Properties of Nitrided Alloys after Diffusion Metallization [04033-1-04033-6]
33) Silicon Betavoltaic Batteries Structures [04034-1-04034-3]
34) Heterostructure Active Area Optimization by Simulation [04035-1-04035-3]
35) Intelligent Decision Support System for Medical Radioisotope Diagnostics with Gamma-camera [04036-1-04036-7]
36) Synthesis of Nanostructured Tin Oxide (SnO2) Powders and Thin Films by Sol-Gel Method [04037-1-04037-4]
37) Wear-resistant Coatings From Electroerosive Micro- and Nanofraction Powders [04038-1-04038-3]
38) Magnetoresistive Properties of the Array of Iron Oxide Nanoparticles in Conducting Matrix [04039-1-04039-7]
39) Production of the Volume Composite Based on Bi2Te3-SiO2 Nanoparticles and its Electroconductivity [04040-1-04040-7]
40) Calculation of the Membrane Thickness of Magnetite Nanoparticles on the Surface of the Transparent Conductive Electrode in the Electric Field [04041-1-04041-3]
41) Extinction and Scattering of Light by Magnetic Colloidal Nanoparticles [04042-1-04042-3]
42) Development and Physico-chemical Study of the Aqueous Dispersion Silver Nanoparticles as the Basis for Creating New Nanomaterials [04043-1-04043-2]
43) Effect of a Temperature Mode of Radiation-thermal Sintering the Structure and Magnetic Properties of Mn-Zn-ferrites [04044-1-04044-3]
44) Properties Study of ZnS Thin Films Prepared by Spray Pyrolysis Method [04045-1-04045-5]
45) The Physical Model of Formation of Hexagonal Ferrites BaFe12O19 [04046-1-04046-4]
46) Microchannel Structures of Betavoltaic Silicon Convertors [04047-1-04047-2]
47) Тhermoresistive Properties of the Thin Film Solid Solutions Based on Cu and Ni [04048-1-04048-5]
48) Structure of Oxidized and Unoxidized Surfaces of InTe Layered Crystals [04049-1-04049-4]
49) Structure, Substructure, Hardness and Adhesion Strength of Multiperiod Composite Coatings MoN / CrN [04050-1-04050-5]
50) Features of Influence of X-radiation and Magnetic Field on the Electrical Characteristics of Barrier Structures Based on p-Si with Dislocation, Designed for Solar Energy [04051-1-04051-5]
51) Temperature Influence on the Properties of Thin Si3N4 Films [04052-1-04052-2]
52) Electrical Resistivity Peculiarities of the Nanograined Bi2Te3 Material [04053-1-04053-3]
53) Optical Transmission and Electro-physicalproperties оf Cd1 – xMnxTe Solid Solutions [04054-1-04054-5]
54) Nonlinear Effects of Laser Surface Modification of Ore Minerals [04055-1-04055-3]
55) The Results of Research of Magnetic Fluid Nanoparticles by Microscopy and X-ray Methods [04056-1-04056-3]
56) Obtaining and Properties of Hexaferrite BaFe12O19 for High-coercivity Permanent Magnets and Substrates Microstrip Microwave Devices of mm-Range [04057-1-04057-4]
57) X-ray Analisis of the Powder of Micro- and Nanometer Fractions, Obtained from Wastes of Alloy T15K6 in Aqueous Medium [04058-1-04058-2]
58) Energy Parameters of Interfacial Layers in Composite Systems: Graphene – (Si, Cu, Fe, Co, Au, Ag, Al, Ru, Hf, Pb) and Semiconductor (Si,Ge) – (Fe, Co, Cu, Al, Au, Cr, W, Pb) [04059-1-04059-7]
59) Investigation of the Gas Atoms Interaction with BC Nanotube [04060-1-04060-3]
60) Theoretical Analysis of Optical Gain in GaN / AlxGa1 – x N Quantum Well Lasers [04061-1-04061-3]
61) Functional Materials for Dye-sensitized Solar Cells [04062-1-04062-2]
62) Effect of Ionizing Radiation on the Properties of Porous Silicon Nanostructures [04063-1-04063-4]
63) Self-organising of Atoms in Germanium and Silicon Melts [04064-1-04064-5]
64) The Temperature Changes of the Energy Characteristics of the Surface Layer of InAs Quantum Dots in GaAs Matrix [04065-1-04065-5]
65) Obtaining of Nanostructured Powders of Barium and Strontium Hexaferrite by the Polymer Precursor Method [04066-1-04066-4]
66) Optical Conductivity of Metal Nanowires with Elliptical Cross Section [04067-1-04067-5]
67) Ferromagnetic Alloys: Magnetoresistance, Microstructure, Magnetism, and Beyond (Review) [04068-1-04068-16]
68) Model of Band Diagram LED White Light in the System of GaN/InGaN [04069-1-04069-3]
69) Influence of Modes Shredding of Source Components by Processes to Synthesis and Activity of Powder Sintering Hexaferrite [04070-1-04070-5]
70) The Influence of Synthesis Temperature on the Structure, Composition and Magnetic Properties of Nanocomposites NiCo/C [04071-1-04071-4]
71) Photostimulated Negative Conductivity of Semiconductor Superlattice [04072-1-04072-5]
72) Hopping Conductivity and Negative Magnetoresistance of the Bulk Nanograined Bi2Te3 Material [04073-1-04073-3]
73) Initiation of Polarized State in the Tantalum Oxide Thin Films Grown by Magnetron Sputtering on a Substrate of Monocrystalline Silicon (100) Followed by Argon and Oxygen Ions [04074-1-04074-5]
74) Magnetic Microstructure Aluminum-substituted Barium Hexaferrite for Microwave Devices mm-Wavelength Range [04075-1-04075-4]
75) The Hydrothermal Autoclave Synthesis of the Nanopowders of the Refractory ZrO2 and HfO2 Oxides [04076-1-04076-2]
76) Specific Energy Characteristics of Nanoporous Carbon Activated by Orthophosphoric Acid [04077-1-04077-6]
77) Contribution of Two-photon Detector Electronic Transitions in the Formation of Dynamic Conductivity of Three-barrier Resonant Tunneling Structures [04078-1-04078-6]
78) Growth and Сharacterization of Cd3As2 + MnAs Сomposite [04079-1-04079-3]
79) Electroerosive Powder Obtained from Alloy VK8 Waste into Butanol [04080-1-04080-3]
80) Investigation of Corrosion Behavior of Bioactive Coverings on Commercially Pure Titanium and its Alloys [04081-1-04081-3]
81) Theoretical Studies of Laws Nanostructuring and Heterogeneous Hardening of Steel Samples by Wave Intensive Plastic Deformation [04082-1-04082-3]
82) Application of the Modernized Method of Averaged Characteristics in Theory Problems of Plasma-beam Superheterodyne Free Electron Lasers [04083-1-04083-8]
83) The Electron Scattering on Local Potential of Crystal Defects in GaSb Whiskers [04084-1-04084-4]
84) Heterocyclic Polymers Perspectives in Nanolayers of Donor Acceptor Heterojunction for Organic Photovoltaic Application [04085-1-04085-4]
85) Effect of a Stable Magnetic Field on Silicon Properties [04086-1-04086-3]
86) The Structure of Small Clusters and IR Spectrum Condensed Matters [04087-1-04087-3]
87) Structural Phase Transition in CdSb + 3 % MnSb Composite at a High Hydrostatic Pressure [04088-1-04088-4]
88) About Using Carbon Nanotubes with Amino Group Modification as Sensors [04089-1-04089-3]
89) The Density Functional Theory Study of Electronical Properties of (ZnO)12 Clusters During Gas Adsorption [04090-1-04090-6]
90) Photoluminescence of One-dimensional Zinc Oxide Arrays Electrodeposited in Pulse Mode [04091-1-04091-4]
91) Interaction of Lamb Waves with Domain Walls in an Iron Borate Plate [04092-1-04092-3]
92) Mechanosynthesis ZnS : Mn Microcrystals [04093-1-04093-5]
93) The Mathematical Model of Solid Structural Unit Heat Distribution Based on the Cluster Approach [04094-1-04094-4]
94) Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate [04095-1-04095-3]
95) Synthesis and Structural Characterization of Nanomanganese Ferrites [04096-1-04096-3]
96) Nanostructure-based Processes at the Carbonizing Steels [04097-1-04097-3]
97) Nanostructured (Ti-Zr-Nb)N Coatings Obtained by Vacuum-arc Deposition Method: Structure and Properties [04098-1-04098-7]
98) Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO2 Nanoparticles [04099-1-04099-3]
99) Kinetic Properties of the Film Systems Based on Ni і V and Ni і Ag(Au) [04100-1-04100-5]
100) Number of Repetitious States in One Dimensional Hubbard Model: a Density Matrix Renormalization Group Perspective [04101-1-04101-4]
101) Nanoelectronics. Spin transport in the NEGF method and quantum spin Hall effect by «bottom-up» approach [04102-1-04102-12]
102) The Formation and Study of the FeCo Nanoparticles Alloy in Structure of Metal-Carbon Nanocomposites FeCo/C [04103-1-04103-5]