Magneto-Ellipsometry Investigations of Multilayer Nanofilms of Fe and Co

Authors	A.T. Morchenko¹ , L.V. Panina¹ , V.G. Kostishyn¹ , N.A. Yudanov¹ , S.P. Kurochka¹, A.A. Sergienko¹, R.D. Piliposyan¹, N.N. Krupa²
Affiliations	¹ National University of Science and Technology, MISIS, 4, Leninsky Ave., 119049 Moscow, Russia ² Institute of magnetism, NASU, 36b, Vernadsky Str., 03142 Kiev, Ukraine
Е-mail	dratm@mail.ru
Issue	Volume 5, Year 2013, Number 4
Dates	Received 05 August 2013; revised manuscript received 05 November 2013; published online 10 December 2013
Citation	A.T. Morchenko, L.V. Panina, et al., J. Nano- Electron. Phys. 5 No 4, 04002 (2013)
DOI
PACS Number(s)	07.60.Fs, 75.70. – i, 75.75. – a, 78.20.Ls
Keywords	Magneto-ellipsometry, Magnetic nanofilms, Kerr effect (2) , In situ ellipsometry (2) .
Annotation	Spectral ellipsometry technique is demonstrated to be a useful tool for the investigation of optical and magneto-optical parameters of magnetic heterostructures. Ellipsometry parameters ψ, Δ were measured in the range of 350-1000 nm. Solving the inverse problem by a regression method the refractive index and thickness of the layers were deduced. Magneto-optical spectra were detected in the configuration of equatorial Kerr effect which is fully compatible with the ellipsometry measurements. Spectroscopic ellipsometry method of magnetic structure characterisation can be used for in situ monitoring of magnetic film growth in various processes such as magnetron sputtering, electron beam evaporation and ion beam sputtering.
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