Temperature Influence on the Properties of Thin Si3N4 Films
| Authors | V.S. Zakhvalinskii1 , P.V. Abakumov2 , A.P. Kuzmenko2 , A.S. Chekadanov2 , E.A. Piljuk1 , V.G. Rodriguez1, I.J. Goncharov1, S.V. Taran1 |
| Affiliations | 1 Belgorod National Research University, 85, Pobedy St., 308015 Belgorod, Russia 2 South-West State University, 94, 50 let Oktyabrya St., 305040 Kursk, Russia |
| Е-mail | |
| Issue | Volume 7, Year 2015, Number 4 |
| Dates | Received 28 September 2015; published online 10 December 2015 |
| Citation | V.S. Zakhvalinskii, P.V. Abakumov, A.P. Kuzmenko, et al., J. Nano- Electron. Phys. 7 No 4, 04052 (2015) |
| DOI | |
| PACS Number(s) | 75.50.Ee, 75.78.Fg |
| Keywords | Raman spectroscopy (18) , Small-angle x-ray scattering (6) , Atomic force microscopy (9) . |
| Annotation | Applying Raman spectroscopy, small-angle x-ray scattering, and atomic force microscopy it were studied phase composition and surface morphology of nanoscale films Si3N4 (obtained by RF magnetron sputtering). |
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List of References |
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