Influence of Annealing on the Morphology of the Vacuum-free Coatings NbNх, NbNx : Si

Authors V.N. Rogoz1,2, A.P. Kuzmenko3 , O.V. Sobol′4, A. Plyushchyk1
Affiliations

1 Sumy State University, 2, Rimskogo-Korsakova St., 40007 Sumy, Ukraine

2 NanoBioMedical Centre, Adam Mickiewicz University in Poznań, Umultowska 85, Poznań, Poland

3 Kursk State Technical University, Knowledge-Intensive Technologies Center of Collaborative Access, 94, 50 Let Oktyabrya St., 305040 Kursk, Russian Federation

4 Kharkov Polytechnical Institute National Technical University, 21, Frunze St., 61002 Kharkov, Ukraine

Е-mail [email protected]
Issue Volume 8, Year 2016, Number 2
Dates Received 08 February 2016; published online 21 June 2016
Citation V.N. Rogoz, A.P. Kuzmenko, O.V. Sobol′, A. Plyushchyk, J. Nano- Electron. Phys. 8 No 2, 02019 (2016)
DOI 10.21272/jnep.8(2).02019
PACS Number(s) 81.40.Ef, 61.72. – y, 68.37. – d
Keywords Morphology (8) , Hardness (12) , Annealing (16) , NbNх, NbNx : Si, Phase and elemental analysis.
Annotation

The paper describes the features of niobium nitride coating changes with the addition of silicon and impurities without him. Samples were prepared by magnetron sputtering at a negative potential Us = − 40 V on silicon substrate, exposed to high temperatures: 800 °C without vacuum.

List of References

English version of article