Influence of Annealing on the Morphology of the Vacuum-free Coatings NbNх, NbNx : Si

Authors V.N. Rogoz1,2, A.P. Kuzmenko3 , O.V. Sobol′4, A. Plyushchyk1

1 Sumy State University, 2, Rimskogo-Korsakova St., 40007 Sumy, Ukraine

2 NanoBioMedical Centre, Adam Mickiewicz University in Poznań, Umultowska 85, Poznań, Poland

3 Kursk State Technical University, Knowledge-Intensive Technologies Center of Collaborative Access, 94, 50 Let Oktyabrya St., 305040 Kursk, Russian Federation

4 Kharkov Polytechnical Institute National Technical University, 21, Frunze St., 61002 Kharkov, Ukraine

Е-mail [email protected]
Issue Volume 8, Year 2016, Number 2
Dates Received 08 February 2016; published online 21 June 2016
Citation V.N. Rogoz, A.P. Kuzmenko, O.V. Sobol′, A. Plyushchyk, J. Nano- Electron. Phys. 8 No 2, 02019 (2016)
DOI 10.21272/jnep.8(2).02019
PACS Number(s) 81.40.Ef, 61.72. – y, 68.37. – d
Keywords Morphology (8) , Hardness (12) , Annealing (16) , NbNх, NbNx : Si, Phase and elemental analysis.

The paper describes the features of niobium nitride coating changes with the addition of silicon and impurities without him. Samples were prepared by magnetron sputtering at a negative potential Us = − 40 V on silicon substrate, exposed to high temperatures: 800 °C without vacuum.

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