Development and Pilot Testing of an Electron Gun

Authors M.O. Drozdenko

Institute of Applied Physics NAS of Ukraine, 58, Petropavlivs’ka Str., 40000 Sumy, Ukraine

Issue Volume 7, Year 2015, Number 3
Dates Received 18 May 2015; revised manuscript received 10 June 2015; published online 20 October 2015
Citation M.O. Drozdenko, J. Nano- Electron. Phys. 7 No 3, 03031 (2015)
PACS Number(s) 29.25.Bx, 52.38.Ph
Keywords Cathode (2) , Electron gun, Focusing, X-ray source.
Annotation The paper describes a new model of three electrode electron gun with indirect heating cathode for multifunctional laboratory facility based on precise electron source for implementation X-ray analysis. Laboratory micro analytical facility was offered at the high-column scanning electron microscope SEM-101M. As a result of numerical simulation of the model of primary electron gun, technological design weaknesses are found and experimental setup cathode junction of free geometry is proposed. Numerical simulation of the electron-optical system gave recommendations for the selection of the geometric parameters and focusing electrode potential. Experimental investigation of the selected modes of installation confirmed reliability of the design while using it for the X-ray sources.

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