Influence of Ion Implantation on the Structural and Stressed State and Mechanical Properties of Nitrides of High-entropy (TiZrAlYNb)N and (TiZrHfVNbTa)N Alloys

Authors O.V. Sobol’1 , I.V. Yakushchenko2
Affiliations

1 National Technical University “Kharkov Polytechnical Institute”, 21, Frunze Str., 61002 Kharkiv, Ukraine

2 Sumy State University, 2, Rimsky Korsakov Str., 40007 Sumy, Ukraine

Е-mail [email protected]
Issue Volume 7, Year 2015, Number 3
Dates Received 16 August 2015; revised manuscript received 17 October 2015; published online 20 October 2015
Citation O.V. Sobol’, I.V. Yakushchenko, J. Nano- Electron. Phys. 7 No 3, 03044 (2015)
DOI
PACS Number(s) 81.40.Wx
Keywords Nitrides of high-entropy alloys, Vacuum-arc cathode evaporation, Phase and elemental composition, Hardness (12) , Ion implantation (5) , Negative ions.
Annotation As a result of deposition of nanostructured multicomponent (TiZrAlYNb)N and (TiZrHfVNbTa)N nit-ride coatings, a phase with FCC lattice and crystallite sizes from 7 nm to 17-20 nm, respectively, is formed. Compressive stresses are developed, with values of – 2.97 GPa and – 3.86 GPa for 6-elements nitrides, and – 0.25 GPa and – 3.14 GPa for 5-elements coatings. Dependence of the stress change on the nitride concentration in the coatings is found, and possible reasons of the observed correlation are discussed. Ion implantation of Au-leads to disorder of the coatings structure in the implanted layer, decrease of nanocrystallite sizes, and, as a result, increase of nanohardness of the coatings to 39 GPa.

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