Structure, Substructure, Hardness and Adhesion Strength of Multiperiod Composite Coatings MoN / CrN

Автори S.S. Grankin1 , V.M. Beresnev1 , O.V. Sobol2 , V.A. Stolbovoy3, V.Yu. Novikov4, S.V. Lytovchenko1, U.S. Nyemchenko1 , A.A. Meylehov2, M.G. Kovaleva4, A.A. Postelnik2, I.N. Toryanik1
Приналежність

1 V.N. Karazin Kharkiv National University, 4, Svobody Sq., 61022 Kharkiv, Ukraine

2 National Technical University “Kharkiv Polytechnic Institute”, 21, Frunze Str., 61002 Kharkiv, Ukraine

3 National Science Center "Kharkiv Institute of Physics and Technology", 1, Akademicheskaya St., 61108 Kharkiv, Ukraine

4 Belgorod National Research University, 85, Pobedy St., 308015 Belgorod, Russia

5 Scientific Center of Physical Technologies of MES and NAS of Ukraine, 6, Svobody Sq., 61022 Kharkiv, Ukraine

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Випуск Том 7, Рік 2015, Номер 4
Дати Одержано 09.11.2015, опубліковано online - 10.12.2015
Посилання S.S. Grankin, V.M. Beresnev, O.V. Sobol, et al., J. Nano- Electron. Phys. 7 No 4, 04050 (2015)
DOI
PACS Number(s) 61.46. – w,62.20.Qp, 62-65. – g
Ключові слова Vacuum-arc coatings, Multilayer coating, Hard coatings, Vacuum-arc deposition (4) .
Анотація A comprehensive study of the influence of the thickness of the layers, Us and PN on the structural engineering to obtain high mechanical properties in multilayer composite MoN / CrN vacuum-arc coatings has been conducted by means of scanning electron microscopy with energy analysis, X-ray diffraction studies microindentation and scratch testing methods. It has been determined that in the studied PN = (2-30) × 10 – 4 Torr, the content of nitrogen in the coatings varies from 6.3 to 33 at. %, which leads even at the greatest nitrogen content to the formation of lower phase by nitrogen, γ-Mo2N and isostructural CrN with the vacant sites in the nitrogen sublattice. The increase of thickness of the layers applied on the substrate in a stationary state promotes the increase of nitrogen content. Along with this, the lowest microdeformation and the average size of crystallites are formed at Ub = – 300 V, which defines the achievement of greater hardness of 35 GPa and high adhesion strength, which resists the destruction, Lc5 = 187.6 N.

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