Structural Properties and Elemental Composition of Au+ Implanted ZnO Films, Obtained by Sol-gel Method

Authors A.D. Pogrebnjak1 , T.O. Berestok1, 2 , A.S. Opanasyuk1 , Y. Takeda3, K. Oyoshi3, F.F. Komarov4, J. Kassi1

1 Sumy State University, Rimsky-Korsakov St. 2, 40007 Sumy, Ukraine

2 Catalonia Institute for Energy Research, Jardins de les Dones de Negre St. 1, Sant Adria del Besos, 08930 Barcelona, Spain

3 National Institute for Materials Science, Ibaraki St. 305-0047 Tsukuba, Japan

4 Belarusian State University, Independence Ave 4, 220030 Minsk, Belarus

Issue Volume 6, Year 2014, Number 2
Dates Received 30 January 2014; revised manuscript received 06 May 2014; published online 20 June 2014
Citation A.D. Pogrebnjak, T.O. Berestok , A.S. Opanasyuk, et al., J. Nano- Electron. Phys. 6 No 2, 02003 (2014)
PACS Number(s) 81.05.Dz, 81.20.Fw
Keywords ZnO : Al, Implantation Au+, Sol-gel method (4) , RBS, Raman investigation.
Annotation The undoped and doped aluminum ZnO films were obtained by sol-gel method onto glass substrates with further implantation of Au+ ions. RBS, XRD methods and Raman spectroscopy were used for films characterization. The XRD analysis showed that obtained samples have a hexagonal structure with lattice constants a  0.3245-0.3249 nm, c  0.5203-0.5204 nm, c / a  1.602-1.603 and growth texture [101]. The values of coherent scattering domains (CSD) were equal to L(201)  (13.0-13.9) nm, L(101)  (12.0-12.2) nm, L(002)  (11.3-12.6) nm. It is found that there is not observed the effects of Au+ implantation on the values of CSD, lattice constants and texture of the films. According to X-ray analysis ions of gold in the films are mainly incorporated in the form of phase of AuZn3.

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