The Analysis of Elemental Composition and Depth Profiles of Nitride Nanostructured Coating Based on the TiHfVNbZr High-entropy Alloy

Authors A.A. Bagdasaryan1, E. Smirnova1, P. Konarski2 , M. Miśnik2, A. Zawada3
Affiliations

1 Sumy State University, 2, Rimsky-Korsakov Str., 40007 Sumy, Ukraine

2 Institute of Tele and Radio Technology, 11, Ratuszowa Str., Warszawa, Poland

3 Gdansk University of Technology, 11/12, Gabriela Narutowicza Str., Gdansk, Poland

Е-mail [email protected]
Issue Volume 6, Year 2014, Number 2
Dates Received 26 May 2014; published online 20 June 2014
Citation A.A. Bagdasaryan, E. Smirnova, P. Konarski, et al., J. Nano- Electron. Phys. 6 No 2, 02028 (2014)
DOI
PACS Number(s) 81.05.Je, 81.70.Jb
Keywords High-entropy alloy, Nitride coating, Depth profiles, Elemental composition (2) , Ion beam technique.
Annotation The elemental and structural features of the nitride nanostructured coating produced by vacuum arc evaporation from high-entropy cathode TiHfVNbZr were studied. Using of the complementary methods of elemental analysis (RBS, SIMS and GDMS) allowed to carry out a comprehensive analysis of the elemental composition, namely to determine the chemical composition of the surface layer, to establish the characteristics of the distribution of elements in depth and to identify uncontrollable impurities.

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