The Influence of the Bias Potential on the Phase Composition, Structure, Substructure and Mechanical Properties of Multilayer TiN / ZrN System Obtained by Vacuum Arc Evaporation

Authors O.V. Sobol’1 , A.A. Andreev2 , V.A. Stolbovoy2 , V.F. Gorban’3 , N.V. Pinchuk1 , A.A. Meylekhov1
Affiliations

1 National Technical University «Kharkiv Polytechnic Institute», 21, Frunze Str., 61002 Kharkiv, Ukraine

2 National Science Center Kharkov Institute of Physics and Technology, 1, Akademicheskaya Str., 61108 Kharkiv, Ukraine

3 Frantsevich Institute for Problems of Materials Science, 3, Krzhizhanovsky Str., 03680 Kyiv-142, Ukraine

Е-mail [email protected]
Issue Volume 7, Year 2015, Number 2
Dates Received 10 December 2014; published online 10 June 2015
Citation O.V. Sobol’, A.A. Andreev, V.A. Stolbovoy, et al., J. Nano- Electron. Phys. 7 No 2, 02035 (2015)
DOI
PACS Number(s) 81.07.Bc, 61.05.сp, 68.55.jm, 61.82.Rx
Keywords Vacuum-arc method, Pressure (12) , Bias potential (2) , ZrN (8) , TiN (96) , Texture (2) , Substructure (2) , Micro-deformation, Crystallite size (2) , Hardness (12) , Modulus of elasticity.
Annotation Influence of constant and pulsed negative bias potential applied to the substrate during the deposition on the phase composition, structure, substructure and mechanical properties of multilayer ZrN / TiN coatings with a bilayer thickness of 50-200 nm was studied. Two-phase coating obtained from ZrN and TiN phases of the fcc structure of NaCl type without a significant loss of planarity and mixing layers is established. The use of high-voltage pulses would greatly change the structure and properties at Ub < 100 V. At larger value of Ub, constant potential becomes crucial for the structural engineering of the coating. It is shown that the greatest hardness is inherent to the coatings obtained by Ub = – 140...– 150 V, and H/E reaches a large value of 0.14, which is difficult to obtain in the single-layer coatings.

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