The Effect of High-voltage Pulse Potential Applied to the Substrate on the Phase Composition and Structure of the Vacuum-arc TiN Coatings

Authors O.V. Sobol1, N.V. Pinchuk1 , A.A. Andreev2

1 National Technical University «Kharkiv Polytechnic Institute», 21, Frunze Str., Kharkiv, Ukraine

2 National Science Center Kharkov Institute of Physics and Technology, 1, Akademicheskaya Str., Kharkiv, Ukraine

Issue Volume 7, Year 2015, Number 2
Dates Received 15 May 2015; published online 10 June 2015
Citation O.V. Sobol, N.V. Pinchuk, A.A. Andreev, J. Nano- Electron. Phys. 7 No 2, 02042 (2015)
PACS Number(s) 52.77.Dq, 81.07.Bc, 61.05.cp, 61.82.Rx,
Keywords TiN (96) , Coatings (10) , Pulse influence, Potential of bias, Duration, Radiation factor, Texture (2) , Deformation (8) .
Annotation The effect of the high-voltage supply capacity in the form of different pulse duration on the formation of preferentially oriented crystallites and the stress-strain state of the vacuum-arc TiN coatings was analyzed. It is shown that the deposition of coatings in a high-voltage cascade forming exposure leads to the growth of the crystallites with axis texture [110] and the change in the stress-strain state: strengthening of a strain in a group of crystallites with the axis [110] and reduction of the strain in a group of crystallites with axis [111]. The results are explained by the increase in mobility of atoms and streamlining processes in the field of displacement cascades, formed under the influence of high-energy bombarding ions accelerated in the field of high-voltage pulse potential. A generalized graph of the texture type on the pulse potential and influence of the pulse duration, applied to the substrate, on the total deposition time are plotted.

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