Adhesion Strength of Multi-element Coatings of the System (TiNbCrZrSi)N

Authors U.S. Nyemchenko1 , V.Yu. Novikov2, S.S. Grankin1 , V.V. Ganenko1, M.Yu. Arseenko2 , O.V. Sobol3, O.P. Tkach4, M.G. Kovaleva2 , L.V. Malikov5

1 V.N. Karazin Kharkiv National University, 4, Svobody Sq., Kharkiv, Ukraine

2 Belgorod National Research University, 85, Peremogy Str., Belgorod, Russia

3 Kharkiv National University “Kharkiv Polytechnic Institute”, 21, Frunze Str., Kharkiv, Ukraine

4 Sumy State University, Sumy, 2, Rimsky-Korsakov Str., Ukraine

5 Scientific Center of Physical Technologies, 6, Svobody Sq., Kharkiv, Ukraine

Е-mail [email protected]
Issue Volume 7, Year 2015, Number 2
Dates Received 15 May 2015; published online 10 June 2015
Citation U.S. Nyemchenko, V.Yu. Novikov, S.S. Grankin, et al., J. Nano- Electron. Phys. 7 No 2, 02040 (2015)
PACS Number(s) 61.46. – w, 62.20.Qp, 62-65. – g
Keywords Multi-element nitride coatings, Adhesion strength, Hardness (12) , Elastic modulus.
Annotation The mechanical characteristics of the multi-element coatings (TiNbCrZrSi)N have been studied depending on the deposition process parameters, in particular the bias potential. X-ray diffraction spectra has shown, that the coating is formed on the basis of single-phase state of the fcc lattice, which in the case of nitrides has structural type NaCl. Hardness and elastic modulus of the coating (TiNbCrZrSi)N varies from H = 24 GPa and E = 254 GPa to H = 28.9 GPa and E = 291 GPa. Coatings’ index of resistance to plastic deformation (H3/E2) has a value of 0.28.

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