Structural Engineering of Multilayer TiN / CrN System Obtained by the Vacuum Arc Evaporation

Authors O.V. Sobol’1 , A.A. Andreev2 , V.A. Stolbovoy2 , V.F. Gorban’3 , N.V. Pinchuk1 , A.A. Meylekhov1
Affiliations

1 National Technical University «Kharkiv Polytechnic Institute», 21, Frunze Str., 61002 Kharkiv, Ukraine

2 National Science Center Kharkov Institute of Physics and Technology, 1, Akademicheskaya Str., 61108 Kharkiv, Ukraine

3 Frantsevich Institute for Problems of Materials Science, 3, Krzhizhanovsky Str., 03680 Kyiv-142, Ukraine

Е-mail [email protected]
Issue Volume 7, Year 2015, Number 1
Dates Received 21 November 2014; revised manuscript received 12 March 2015; published online 25 March 2015
Citation O.V. Sobol’, A.A. Andreev, V.A. Stolbovoy, et al., J. Nano- Electron. Phys. 7 No 1, 01034 (2015)
DOI
PACS Number(s) 81.07.Bc, 61.05.сp, 68.55.jm, 61.82.Rx
Keywords Vacuum-arc method, Pressure (12) , Bias potential (2) , CrN (7) , TiN (96) , Texture (2) , Substructure (2) , Microstrain, Size of crystallites.
Annotation By the X-ray diffraction, electron microscopy, and microindentation methods we have investigated the phase composition, structure, substructure and hardness of vacuum arc multilayer coatings of TiN / CrN system obtained in the range of nitrogen pressure of 1×10–5 ... 5×10–3 Torr when applying continuous and pulsed negative bias potential. Formation of two-phase state with a preferred orientation of the crystallite growth was established at high pressure of (1 ... 5)×10–3 Torr and feeding of negative DC bias potential: Ub = – 20 V – texture axis [100], at – 230 V – texture axis [111]. Based on the studies of substructural state, connection of the transition to the superhard (57 GPa) state with decrease in the crystallite size and microstrain in TiN layers was established.

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