The Multifractal Investigation of Surface Microgeometry of (Ti-Hf-Zr-V-Nb)N Nitride Coatings

Authors А.D. Pogrebnjak1, V.N. Borisyuk1, А.А. Bagdasaryan1, О.V. Maksakova2, E.V. Smirnova1

1 Sumy State University, 2, Rimsky Korsakov Str., 40007 Sumy, Ukraine

2 Poltava National Pedagogical University, 2, Ostrogradsky Str., 36000 Poltava, Ukraine

Issue Volume 6, Year 2014, Number 4
Dates Received 15 September 2014; published online 29 November 2014
Citation А.D. Pogrebnjak, V.N. Borisyuk, А.А. Bagdasaryan, et al., J. Nano- Electron. Phys. 6 No 4, 04018 (2014)
PACS Number(s) 81.05.Je, 05.45.Df, 81.70.Jb
Keywords Nitride coating, Surface morphology (2) , Multifractal analysis.
Annotation The qualitative investigation of the morphology of (Ti-Hf-Zr-V-Nb) N nitride coatings depending on the bias potential of the substrate was performed. The two-dimensional multifractal fluctuation analysis was used for the quantitative analysis of the changes in microscopic irregularities. The calculation of statistical parameters (generalized Hurst exponent and multifractal spectrum) indicates compliance with theoretical calculations and experimental studies, namely, smoothing of the coating surface with the increasing ion energy.

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