Study of Elemental and Structural Phase Composition of Multilayer Nanostructured TiN / MoN Coatings, their Physical and Mechanical Properties

Authors B.O. Postolnyi1, P. Konarski2 , F.F. Komarov3, O.V. Sobol’4, O.V. Kyrychenko1, D.S. Shevchuk1

1 Sumy State University, 2, Rymskogo-Korsakova Str., 40007 Sumy, Ukraine

2 Tele and Radio Research Institute, 11, Ratuszowa Str., 03-450 Warszawa, Poland

3 Belarusian State University, 4, Nezavisimosti Av., 220030 Minsk, Republic of Belarus

4 National Technical University «Kharkiv Polytechnic Institute», 21, Frunze Str., 61002 Kharkiv, Ukraine

Е-mail [email protected]
Issue Volume 6, Year 2014, Number 4
Dates Received 01 September 2014; published online 29 November 2014
Citation B.O. Postolnyi, P. Konarski, F.F. Komarov, et al., J. Nano- Electron. Phys. 6 No 4, 04016 (2014)
PACS Number(s) 61.46. – w, 62.20. – x, 62.25. – g
Keywords Nitrides, Nanostructured coatings, Multilayer (11) , Wear resistance (2) , Hardness (12) , Elastic modulus, Plasticity index.
Annotation This paper presents the results of investigation multilayer TiN / MoN coatings. Coatings were fabricated using Arc-PVD method. Period thickness of nanoscale layers in coatings was λ = 8, 25, 50 and 100 nm. The total thickness of coatings was up to 8.4 m. Samples were studied using SEM, TEM, EDS, RBS, XRD, SIMS and nanoindentation. The actual thickness of the layers has a few larger values than expected (in most cases per 25 %). The formation of two phases was found: stoichiometric TiN (fcc) and cubic γ-Mo2N (fcc). Maximum values of hardness and elasticity modulus were obtained for coating with λ = 8 nm: H = 47 GPa, E = 470 GPa. Plasticity index and its dependence on the thickness of layer period (λ) were calculated. The most plastic coating was the sample with H / E = 0.1.

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