Atomic Force Analysis of Elastic Deformations of CD

Authors	A. Kuzmenko¹ , A. Kuzko¹, D. Timakov¹, M. Dobromyslov²
Affiliations	¹ Southwest State University, 94, 50 Let Oktyabrya Str., 305040 Kursk, Russia ² Pacific National University, 136, Tihookeanskaya Str., 680035 Khabarovsk, Russia
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Issue	Volume 5, Year 2013, Number 4
Dates	Received 24 October 2013; revised manuscript received 10 December 2013; published online 31 January 1990
Citation	A. Kuzmenko, A. Kuzko, D. Timakov, M. Dobromyslov, J. Nano- Electron. Phys. 5 No 4, 45 (2013)
DOI
PACS Number(s)	62.20.F. –
Keywords	Elastic effects, Atomic force microscopy (9) , Nanoindenter, CD (68) , Polycarbonate.
Annotation	The procedure for the determination of elastic parameters according to reference nanometer lithographic marks by atomic force microscopy on samples with up to microscopic sizes is proposed. Analysis of dynamic changes of elastic characteristics that makes it possible to establish the critical rotation velocity of a CD without plastic deformations has been made.
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