Mathematical Models of Pressure and Microdisplacement Sensors Based on Electric Field Perturbation of the Surface Acoustic Waves
| Authors | M.F. Zhovnir , O.O. Oliinyk, L.D. Pysarenko |
| Affiliations | National Technical University of Ukraine "Kyiv Polytechnic Institute", 16/9, Polytechnique St., 03056 Kyiv-56, Ukraine |
| Е-mail | zhovnir101@gmail.com |
| Issue | Volume 8, Year 2016, Number 1 |
| Dates | Received 09 November 2015; published online 15 March 2016 |
| Citation | M.F. Zhovnir, O.O. Oliinyk, L.D. Pysarenko, J. Nano- Electron. Phys. 8 No 1, 01024 (2016) |
| DOI | 10.21272/jnep.8(1).01024 |
| PACS Number(s) | 77.65.Dq, 64.60.Ej |
| Keywords | Surface acoustic waves (SAW), Dispersion of the phase velocity of the wave, SAW oscillator, Microdisplacement and pressure sensor. |
| Annotation | The paper describes the functional charts, mathematical models and metrological parameters estimation of microdisplacements and pressure sensors on the basis of the electric field perturbation of the surface acoustic waves (SAW), which are distributed on the surface of a piezoelectric |
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List of References English version of article |
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