Influence on Mechanical Characteristics of Thickness of Layers in MoN/CrN Multilayer Coatings, Deposited Under the Influence of Negative Bias Potential

Authors V.М. Beresnev1 , O.V. Sobol´2, А.V. Stolbovoy3, S.V. Lytovchenko1 , D.А. Kolesnikov4 , U.S. Nyemchenko1 , А.А. Meylehov2 , А.А. Postelnyk2

1 Karazin Kharkiv National University, Kharkiv, Ukraine

2 National Technical University «Kharkiv Polytechnic Institute», Kharkiv, Ukraine

3 Scientific Center of Physical Technologies of Ministry of Education and Science and National Academy of Science of Ukraine, Kharkiv, Ukraine

4 Belgorod National Research University, Belgorod, Russia

Issue Volume 8, Year 2016, Number 1
Dates Received 16 February 2016; published online 15 March 2016
Citation V.М. Beresnev, O.V. Sobol´, А.V. Stolbovoy, et al., J. Nano- Electron. Phys. 8 No 1, 01043 (2016)
DOI 10.21272/jnep.8(1).01043
PACS Number(s) 61.46. – w, 62.20. Op. 62-65. – g
Keywords Multilayer coating MoN/CrN, Layer thickness, Bias potential (2) , Structure (105) , Crystallites nanosize, Mixing (3) , Hardness (12) , Abrasive strength.

A complex study of the influence of thickness of layers of multilayer composition MoN/CrN on phase and structure state and mechanical properties of the coatings during applying constant negative Ub has been held using structure engineering method. It was found that mixing in interboundary areas of the layers at high Ub = – 150 V leads to sharp decrease of mechanical properties at thickness of layers h ≤ 40 nm. The highest hardness of 39.8 GPa and abrasive strength for LC5 = 145 N was reached at h ≈ 12 nm at applying small Ub = – 20 V.

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