Автори | Zh.T. Nakysbekov1, M.Zh. Buranbayev1, M.B. Aitzhanov1, G.S. Suyundykova1, M.T. Gabdullin1, 2 |
Афіліація |
1Al-Farabi Kazakh National University, 71, Al-Farabi Ave., 050040 Almaty, Kazakhstan 2Kazakh-British Technical University, 59, Tole bi Str., 050000 Almaty, Kazakhstan |
Е-mail | nakysbekov.zhasulan@gmail.com |
Випуск | Том 10, Рік 2018, Номер 3 |
Дати | Одержано 05.04.2018; опубліковано online 25.06.2018 |
Цитування | Zh.T. Nakysbekov, M.Zh. Buranbayev, J. Nano- Electron. Phys. 10 No 3, 03010 (2018) |
DOI | https://doi.org/10.21272/jnep.10(3).03010 |
PACS Number(s) | 81.10.Bk, 61.46. + w |
Ключові слова | Copper (8) , Copper nanopowder (2) , Nanoparticles (70) , PVD method, RF plasma, Synthesis (27) , Cathode sputtering. |
Анотація |
The paper describes the design features of the synthesis of copper nanoparticles by the cathode sputtering method in radio-frequency plasma. The dependence of the size and number of Cu nanoparticles on the plasma power, sputtering time, gas flow and pressure was studied. Optimal parameters for obtaining copper particles with an extended fractal structure were determined. |
Перелік посилань |