Software and Hardware System for the Investigation of the Thin Film Optical Properties

Authors M.G. Demydenko , S.I. Protsenko , K.V. Tyschenko , O.V. Fedchenko
Affiliations

Sumy State University, 2, Rimsky Korsakov Str., 40007 Sumy, Ukraine

Е-mail [email protected]
Issue Volume 4, Year 2012, Number 2
Dates Reseived 12 April 2012; revised manuscript received 23 May 2012; published online 04 June 2012
Citation M.G. Demydenko, S.I. Protsenko, K.V. Tyschenko, O.V. Fedchenko, J. Nano- Electron. Phys. 4 No 2, 38 (2012)
DOI
PACS Number(s) 7.60.Fs, 06.05.cm
Keywords Null-ellipsometry, X-Ray reflectivity, Optical coefficients, Frenel equations, Genetic algorithm (5) .
Annotation Using Torhlabs optical elements and graphic software development system LabVIEW 2010 the software and hardware automation system for the investigation of the optical properties of multilayer film systems was built. The joint genetic algorithm was suggested to process experimental data of Null-ellipsometry and X-ray reflectometry. It was shown that the proposed technique lets one simulate phase transitions, diffusion processes and interface blurring in multilayer film systems very accurate for different computational theoretic models.

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