Influence of the Bias Potential and the Pressure of the Nitrogen Atmosphere on the Structure and Properties of Vacuum-arc Coatings Based on the AlCrTiZrNbV High-entropy Alloy

Authors O.V. Sobol′1 , A.A. Andreev2 , V.F. Gorban′3 , А.А. Postelnyk1 , V.A. Stolbovoy2 , A.V. Zvyagolskiy1

1National Technical University «Kharkiv Polytechnic Institute», 2, Kyrpychov Str., 61002 Kharkiv, Ukraine

2National Science Center Kharkov Institute of Physics and Technology, 1, Akademicheskaya Str., 61108 Kharkiv, Ukraine

3Frantsevich Institute for Problems of Materials Science, Krzhizhanovsky str., 3, 03142 Kyiv-142, Ukraine

Issue Volume 10, Year 2018, Number 5
Dates Received 19 September 2018; revised manuscript received 25 October 2018; published online 29 October 2018
Citation O.V. Sobol′, A.A. Andreev, V.F. Gorban′, et al., J. Nano- Electron. Phys. 10 No 5, 05046 (2018)
PACS Number(s) 64.75.St, 81.07.Bc, 62.25. – g, 61.05.cp, 61.82.Rx
Keywords Vacuum arc, AlCrTiZrNbV, Bias potential (2) , Рressure, Structural engineering, Phase composition (3) , Texture (2) , Hardness (12) .

The effect of the constant bias potential (Ub) supplied to the substrate upon condensation and pressure of the nitrogen atmosphere (PN) on the elemental composition, growth morphology, texture, and physical-mechanical characteristics of vacuum-arc (AlCrTiVZrNb)Nx coatings is studied. It is established that with increasing Ub from – 110V to  – 200V, the axis of preferential growth of crystallites of the fcc phase from [100] to [110] changes. Such a change is accompanied by a decrease in the hardness (H) and the ratio H/E (where E is the modulus of elasticity). The conditions for the formation of the preferential orientation of the crystallites (axial texture) of vacuum-arc (AlCrTiVZrNb)Nx coatings and the influence of texture on mechanical properties are discussed. It was established that the change in PN in the range (1.7-5)(10 – 3 Torr basically allows to vary the degree of filling of the coating with nitrogen atoms. Based on the revealed regularities, the conditions for achieving high hardness for vacuum-arc coatings of nitrides AlCrTiVZrNb high-entropy alloy are substantiated. Because of the presence in the alloy of elements with a relatively low heat of nitride formation, in order to achieve high hardness, it is necessary to use deposition conditions with relatively low energy of bombarding atoms. The use of a low Ub ( –110 V at the highest pressure PN ( 5(10 – 3 Torr allows achieving an superhard state with a hardness of 44 GPa.

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