(TiZr)N/(TiSi)N Maitilayer Nanostructured Coatings obtained by Vacuum Arc Deposition

Authors S.V. Lytovchenko1 , B.А. Mazilin1, V.M. Beresnev1 , V.А. Stolbovoy2, M.G. Kovalyova3, Е.V. Kritsyna3, I.V. Kolodiy2, О.V. Glukhov4 , L.V. Malikov5

1V.N. Karazin Kharkiv National University, Kharkiv, Ukraine

2National Scientific Centre “Kharkiv Institute of Physics and Technology”, Kharkiv, Ukraine

3Belgorod National Research University, Belgorod, Russian Federation

4Kharkiv National University of Radio Electronics, Kharkiv, Ukraine

5Scientific Centre of Physical Technologies of the Ministry of Education and Science and National Academy of Science of Ukraine, Kharkiv, Ukraine

Issue Volume 10, Year 2018, Number 5
Dates Received 16 September 2018; revised manuscript received 22 October 2018; published online 29 October 2018
Citation S.V. Lytovchenko, B.А. Mazilin, V.M. Beresnev, et al., J. Nano- Electron. Phys. 10 No 5, 05041 (2018)
DOI https://doi.org/10.21272/jnep.10(5).05041
PACS Number(s) 61.46. – w, 62.20.Qp, 62-65. – g
Keywords Nitride coatings, Multilayer coating, Composition of elements, Structure (105) , Microhardness (2) , Adhesive strength.

The paper investigates the structure and properties of nanoscale multilayer coatings based on (TiZr)N and (TiSi)N produced by vacuum arc technique. Also, it provides an analysis of the impact of partial pressure of nitrogen on structural and phase state of coatings. The nitride phases are strongly textured, crystallographic planes (111) of most grains are oriented parallel to the surface. Dimensions of the coherent scattering regions and values of micro-distortions of the lattice have been calculated. The hardness of coatings reached 37.1 GPa, and the adhesion fracture load exceeds 150 N. The process technology ensures high uniformity of and a low defect rate in obtained coatings.

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