Separation Process of Polydisperse Particles in the Plasma of Radio-frequency Discharge
| Автори | D.G. Batryshev , T.S. Ramazanov , M.K. Dosbolayev , M.T. Gabdullin |
| Приналежність | Al-Farabi Kazakh National University, National nanotechnological laboratory of opened type, 71, Al Farabi Av., 050040 Almaty, Kazakhstan |
| Е-mail | |
| Випуск | Том 6, Рік 2014, Номер 3 |
| Дати | Одержано 19.05.2014, опубліковано online - 15.07.2014 |
| Посилання | D.G. Batryshev, T.S. Ramazanov, M.K. Dosbolayev, M.T. Gabdullin, J. Nano- Electron. Phys. 6 No 3, 03032 (2014) |
| DOI | |
| PACS Number(s) | 52.27.Lw, 52.77. – j |
| Ключові слова | Monodisperse particles, Separation (4) , Radio-frequency discharge, Plasma (13) . |
| Анотація | Method of separation of polydisperse particles in the plasma of radio-frequency (RF) discharge is considered. Investigation of plasma equipotential field gave conditions for separation. The purpose of this work was an obtaining of monodisperse particles in the plasma of RF discharge. Samples of monodisperse microparticles of silica and alumina were obtained. The size and chemical composition of samples were studied on a scanning electron microscope Quanta 3D 200i (SEM, USA FEI company). Average size of separated silica nanoparticles is 600 nm, silica and alumina microparticles is 5 mkm. |
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