Small Angle X-ray Scattering in Thin Iron Films

Автори	A.S. Chekadanov¹, A.P. Kuzmenko¹ , S.G. Emelyanov¹ , L.M. Chevyakov¹, M.B. Dobromyslov²
Приналежність	¹ South-West State University, 94, 50 Let Oktyabrya St., 305040 Kursk, Russia ² Pacific National University, 136, Tikhookeanskaya St., 680035 Khabarovsk, Russia
Е-mail
Випуск	Том 6, Рік 2014, Номер 3
Дати	Одержано 19.05.2013, опубліковано online - 15.07.2014
Посилання	A.S. Chekadanov, A.P. Kuzmenko, S.G. Emelyanov, et al., J. Nano- Electron. Phys. 6 No 3, 03023 (2014)
DOI
PACS Number(s)	61.10.Eq
Ключові слова	Small angle X-ray scattering (3) , Atomic force (11) , Scanning electron (18) , Digital holographic microscopy, Thin magnetron films.
Анотація	By small angle X-ray scattering (SAXS) and atomic force microscopy characteristic sizes are determined, structural features of thin iron films deposited by magnetron evaporation onto substrates from pyroceramics are established. It is shown that morphologically the film is characterized by disorder. It is formed from columnar nano crystallites that are oriented either perpendicular to the substrate or situated in its plane, which dictates polydispersity of those coatings. It is shown that SAXS may be thought of as nondestructive technique for analyzing structure and composition and conducting quality control of magnetron films.
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