RF Magnetron Sputtering of Silicon Carbide and Silicon Nitride Films for Solar Cells
| Автори | V.S. Zakhvalinskii1 , E.A. Piljuk1 , I.Yu. Goncharov1 , V.G. Rodriges1, A.P. Kuzmenko2 , S.V. Taran1 , P.A. Abakumov2 |
| Приналежність | 1 Belgorod National Research University, 85, Pobedy Str., 308015 Belgorod, Russia 2 South-West State University, 94, 50 LetOctyabtyastr Str., Kursk, Russia |
| Е-mail | |
| Випуск | Том 6, Рік 2014, Номер 3 |
| Дати | Одержано 19.05.2014, опубліковано online - 15.07.2014 |
| Посилання | V.S. Zakhvalinskii, E.A. Piljuk, I.Yu. Goncharov, et al., J. Nano- Electron. Phys. 6 No 3, 03062 (2014) |
| DOI | |
| PACS Number(s) | 61.10.Eq |
| Ключові слова | Atomic force microscopy (9) , RF- magnetron sputtering, Silicon carbide (9) , Silicon nitride (2) , Thin films (60) , Solar cells (17) . |
| Анотація | RF-magnetron nonreactive sputtering method from solid-phase target in argon atmosphere was used for obtaining thin silicon carbide and silicon nitride films, that are used for constructing solar cells based on substrates of single crystal silicon of p-type. |
|
Перелік посилань |
Інші статті цього номера
1) Hard Alloy Synthesis from Tungsten-containing Electroerosion Powders of Micro- and Nanometric Fractions [03001-1-03001-4]2) Impurity Influence on Nitride LEDs [03002-1-03002-2]
3) The Development of the Effective Way of Chromium-containing Wastewater Treatment by Means of Modified Sorbents [03003-1-03003-2]
4) Experimental Study of Coherent Summation of Radiation from Two Widely Aperture Pulsed [03004-1-03004-3]
5) Labyrinth Domain Structure in the Models with Long-range Interaction [03005-1-03005-4]
6) Boron-carbon Nanotube Modification Using Alkaline Metal Atoms [03006-1-03006-2]
7) Analyze of Microstructure of Composition Material Al-Si-Fe System [03007-1-03007-3]
8) Obtaining New Dental Materials Reinforced with Carbon Nanotubes [03008-1-03008-3]
9) Formation of Polymer Films in Organic Photovoltaic Systems [03009-1-03009-4]
10) Distribution of Exchange Interaction Fields for 2D and 3D Systems of Spherical Dipoles [03010-1-03010-4]
11) Production of Copper Electroerosion Nanopowders from Wastes in Kerosene Medium [03011-1-03011-3]
12) Concentration Transitions on the Crystalline Lattices [03012-1-03012-3]
13) The Effect of Interface Tension on Forced Oscillations of Elongated Microdroplet Aggregates in Magnetic Fluids [03013-1-03013-3]
14) [03013-1-03013-1]
15) Fractal Properties of Quasicrystalline Penrose Tiling Synthesis [03014-1-03014-5]
16) Small-scale Vacuum System for Deposition of Multilayer Metallic Films“MVU TM – Magna 3M” [03015-1-03015-2]
17) Elastic and Caloric Properties of Cluster Systems and Nanoparticles [03016-1-03016-4]
18) Piezoelectric Properties of BaTiO3 Nanoparticles with Surfaces Modified by Hydroxyl Groups [03017-1-03017-2]
19) On the Applicability of HF and μ-PCD Methods for Determination of Carrier Recombination Lifetime in the Non-passivated Single-crystal Silicon Samples [03018-1-03018-3]
20) Photosensitive AlGaAs / GaAs Structures Grown by Molecular Beam Epitaxy [03019-1-03019-3]
21) Monolithic Silicon Photodetector - Detector of Ionizing Radiation Based on Functional Integrated MOS Structures [03020-1-03020-4]
22) Thermal and Magnetic Field Sensors Based on Injection-coupled Devices [03021-1-03021-4]
23) 3D-Self-Assemblage and Self-Organization on Natural Colloidal Microinclusions in Mineral Sediments [03022-1-03022-6]
24) Small Angle X-ray Scattering in Thin Iron Films [03023-1-03023-3]
25) Influence of Structural Features and Physico-chemical Properties of Metal-carbon Nanocomposites with Ferromagnetic Metal Inclusions on Microwave Radiation [03024-1-03024-5]
26) Microstructural Barrier-locking Formation Mechanism of Dispersed Current-forming Components of Current Power Supply [03025-1-03025-3]
27) Synthesis of the Carbon Nanomaterials Based on Renewable Bioresources [03026-1-03026-4]
28) Technology for Producing Carbon Nanotubes on the Laboratory Setting for Students [03027-1-03027-3]
29) Influence of Electroconductive Additives in the Positive Electrode Material on Morphology, Structure and Characteristics of the Lead-acid Batteries [03028-1-03028-4]
30) Structural Organization in the System of Magnetized Aggregates in Elliptically Polarized Rotating Magnetic Field [03029-1-03029-4]
31) The Synthesis of Nanodispersed Magnetite Using Electrochemical Method [03030-1-03030-2]
32) Features of Electronic Emission from Surface of Dielectric Thin-film Materials with Ion-beam Etching [03031-1-03031-3]
33) Separation Process of Polydisperse Particles in the Plasma of Radio-frequency Discharge [03032-1-03032-3]
34) Determination of Polydispersity of Magnetics Colloidal Nanopaticles by Optical Methods: Birefringence and Light Scattering Experiments [03033-1-03033-3]
35) Lanthanum-Gallium Tantalate Crystals and their Electrophysical Characterization [03034-1-03034-4]
36) Theoretical Studies of the Structure of the Metal-carbon Composites on the Base of Acryle-nitrile Nanopolimer [03035-1-03035-3]
37) Temperature and Concentration Effects of Aqueous Solution of Sodium Octanoate on Micelle Formation Measured by Small angle X-ray Scattering [03036-1-03036-3]
38) Microwave Properties of Carbon Nanotubes Grown by Pyrolysis of Ethanol on Nickel Catalyst [03037-1-03037-2]
39) Features of Formation of the Nanoparticles of Alloys in Metal-carbon Nanocomposites FeCo / C and NiCo / C on Based Polyacrylonitrile [03038-1-03038-4]
40) The Structure and Magnetic Properties Metal-carbon Nanocomposites FeCo / C on Based of Polyacrylonitrile [03039-1-03039-4]
41) The Structure and Magnetic Properties Metal-carbon Nanocomposites NiCo / C on Based of Polyacrylonitrile [03040-1-03040-3]
42) Localized Electrospark Impacts on Thin Metal Films [03041-1-03041-3]
43) Crystal Growth Mechanism in" Synthesis-solute-diffusion" Method in Ultrasonic Field [03042-1-03042-4]
44) Gallium Arsenide Czokhralski Crystal Growth with High Oscillatory Influences [03043-1-03043-2]
45) Morphological Features of Gallium Arsenide Crystals Grown at Low-frequency Influences to the Crystallization Front [03044-1-03044-4]
46) The Modified Fibrous Material on the Basis of Polyethyleneterephthalate and Metal / Carbon Nanostructures [03045-1-03045-2]
47) Effect of Bias Fields on off-Diagonal Magnetoimpedance (MI) Sensor Performance [03046-1-03046-4]
48) Thermodynamic Analysis of Equilibrium Condition of Carbon-containing Atmospheres in Nanosized Carbide Structures Formation [03047-1-03047-2]
49) Tunnel Effect in Widezone Crystals with Proton Conductivity [03048-1-03048-3]
50) Studing Tungsten-containing Electroerosion Powders and Alloys Synthesized from Them [03049-1-03049-3]
51) The Use of GPUs for Solving the Computed Tomography Problem [03050-1-03050-4]
52) Revisiting the Provision of Nanoscale Precision of Cutting on the Basis of Dynamic Characteristics Modeling of Processing Equipment [03051-1-03051-4]
53) Catalytic Synthesis Lactobionic Acid [03052-1-03052-2]
54) Dynamics of Domain Walls in Iron Borate and Yttrium Orthoferrite in Alternating and Constant Magnetic Fields [03053-1-03053-2]
55) Defragmentation, Thermocapillary Extraction and Agglomeration of Ultradispersed Inclusions of Noble Metals in Laser Processing [03054-1-03054-2]
56) Stability of Magnetic Fluids in Magnetic Fields [03055-1-03055-2]
57) Features of the Rotational Kinetic of Magnetic Fluid Nanoparticles [03056-1-03056-4]
58) Induction of Polymerization of the Surface Nanostructures of the Electrodes by Electric Field [03057-1-03057-3]
59) Study of Capacitive and Electrical Conductivity Characteristics of the System «Nanostructured Electrodes - Dielectric Liquid» [03058-1-03058-4]
60) Liquid-Liquid Polymorphous Transition VS. Micelle Formation of Surfactants [03059-1-03059-2]
61) Influence of Magnetic Pulseprocessing on Oxide Materials Physics and Mechanical Properties [03060-1-03060-5]
62) Structural, Dimensional and Thermoelectric Properties of Melt Spun p-Bi0,5Sb1,5Te3 [03061-1-03061-4]
63) Thermoelectric Properties of Compacted Micro- and Nanodisperse Graphite Materials [03063-1-03063-2]
64) Characterization of Bulk Nanostructural Bi2Te3-based Material Prepared by Microwave-solvothermal Synthesis and Hot Isostatic Pressure [03064-1-03064-5]
65) Prospects for Use of Electrohydrodynamic Dispersion of Charged Meniscus and Jets in the Development and Creation of New Materials and Processes [03065-1-03065-2]
66) Hardening of Structural Steel by Pulsed Plasma Treatment [03066-1-03066-3]
67) Plasmon Resonance in A-С : Н Films Modified with Platinum Nanoclusters [03067-1-03067-3]
68) Evaluation of Silver and Gold Nanoparticles on Polyester Fibers by Fluorescent Polarization Raman Spectra [03068-1-03068-5]
69) Deformation Wave Hardening of Metallic Materials [03069-1-03069-4]
70) Production of Quasicomposite Surface Layer of a Metal Material by Shock Wave Strain Hardening [03070-1-03070-4]
71) Вплив термічного фактора на фазово-структурні й субструктурні станиіонно-плазмових покриттів квазібінарної системи TiC-WC [03071-1-03071-4]
72) Restriction of Helmholtz Model [03072-1-03072-4]
73) On Properties of Magneto-dielectric Composites in the Effective Medium Approximation [03073-1-03073-6]
74) Physics of Hermetic Sealing of Large Portion of Gas Using Magnetic Fluid Membrane [03074-1-03074-3]
75) On Influence of Magnetic Fields and Excitation Conditions on the Magnetization Distribution in Microwire Magnetoimpedance Element [03075-1-03075-5]
