On Some Improvements of Ion Microprobe Mass Analyzer

Authors O.S. Kuzema1 , P.O. Kuzema2
Affiliations

1 Sumy National Agrarian University, 160, Kirov Str., 40021 Sumy, Ukraine

2 Chuiko Institute of Surface Chemistry of NAS of Ukraine, 17, General Naumov Str., 03164 Kyiv, Ukraine

Е-mail [email protected]
Issue Volume 5, Year 2013, Number 3
Dates Received 15 April 2013; revised manuscript received 12 May 2013; published online 17 October 2013
Citation O.S. Kuzema, P.O. Kuzema, J. Nano- Electron. Phys. 5 No 3, 03045 (2013)
DOI
PACS Number(s) 07.75. + h
Keywords Ion probe, Magnetic prism, Ion focusing, Energy analyzer, Mass analyzer, Electrostatic lens, Resolution.
Annotation It has been considered the ion-optical properties and characteristics of ion microprobe analyzer in which the primary ion beam mass separation is realized by the magnetic prism, and the beam spherical capacitor is used in the secondary ion analyzing system as energy analyzer which form parallel ion beam at the mass analyzer inlet. It has allowed to improve the instrument parameters and to scale down its overall dimension.

List of References

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