Small Angle X-ray Scattering in Thin Iron Films

Authors	A.S. Chekadanov¹, A.P. Kuzmenko¹ , S.G. Emelyanov¹ , L.M. Chevyakov¹, M.B. Dobromyslov²
Affiliations	¹ South-West State University, 94, 50 Let Oktyabrya St., 305040 Kursk, Russia ² Pacific National University, 136, Tikhookeanskaya St., 680035 Khabarovsk, Russia
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Issue	Volume 6, Year 2014, Number 3
Dates	Received 19 May 2013; published online 15 July 2014
Citation	A.S. Chekadanov, A.P. Kuzmenko, S.G. Emelyanov, et al., J. Nano- Electron. Phys. 6 No 3, 03023 (2014)
DOI
PACS Number(s)	61.10.Eq
Keywords	Small angle X-ray scattering (3) , Atomic force (11) , Scanning electron (18) , Digital holographic microscopy, Thin magnetron films.
Annotation	By small angle X-ray scattering (SAXS) and atomic force microscopy characteristic sizes are determined, structural features of thin iron films deposited by magnetron evaporation onto substrates from pyroceramics are established. It is shown that morphologically the film is characterized by disorder. It is formed from columnar nano crystallites that are oriented either perpendicular to the substrate or situated in its plane, which dictates polydispersity of those coatings. It is shown that SAXS may be thought of as nondestructive technique for analyzing structure and composition and conducting quality control of magnetron films.
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