Investigation of the Effect of the Composition of Residual Gases on the Hardness, Adhesion Properties and the Composition of SiC-AlN Coatings Deposited by the Magnetron Sputtering

Authors I.Yu. Gоncharov1, D.A. Kolesnikov1 , V.Ju. Novikov1, M.G. Kovaleva1 , S.V. Lytovchenko2, B.A. Mazilin2, D.V. Horokh2 , V.M. Beresnev2 , David Alejandro Diaz Yanez1

1Belgorod National Research University, 85, Pobedy Str., 308015 Belgorod, Russia

2V.N. Karazin Kharkiv National University, 4, Svobody Sq., 61000 Kharkiv, Ukraine

Issue Volume 10, Year 2018, Number 3
Dates Received 01.05.2018; published online 25.06.2018
Citation I.Yu. Gоncharov, D.A. Kolesnikov, V.Ju. Novikov, et al., J. Nano- Electron. Phys. 10 No 3, 03028 (2018)
PACS Number(s) 61.46. – w, 62.20.Qp, 62 – 65. – g
Keywords Magnetron sputtering (14) , Adhesion, Composite target, Microhardness (2) .

By means of slip castings from the pure micron-sized powders of SiC and AlN in a molar ratio of 1:1, a SiC-AlN target was produced for subsequent magnetron sputtering in the form of a disk with a diameter of 100 mm. The total number of additives activating the sintering and obtaining a low-porous material in the SiC-AlN composite did not exceed 1 %. The coatings on the surface of stainless steel and monocrystalline silicon were obtained my means of magnetron sputtering of the composite target. The results of the investigation of the effect of argon-nitrogen ration environment on the structure, composition, mechanical and adhesive properties of the coatings are presented. Two series of samples were manufactured with the following parameters: 100 %Ar, 44,4 % Ar + 55,6 % N. The thickness of the coatings obtained was about 1.5 mm. The hardness of the coatings was determined from the analysis of the load-displacement curves obtained with the help of an ultramicro-hardness by SHIMADZU company tester. For coatings deposited in an argon atmosphere, the microhardness was about 3320 HV, and for the coatings deposited in an Ar + N atmosphere was – 1600 HV. It was also found that the injection of nitrogen to the experimental chamber reduces the adhesion strength of the coatings by the factor of 1.5 times.

List of References

English version of article