Structural Engineering of the Growth of Crystallites with a Predominant Orientation in Bilayer Multi-Period Vacuum Arc Nitride Coatings

Authors O.V. Sobol′1, R.P. Mygushchenko1 , А.А. Postelnyk1 , E.V. Onoprienko2, T.O. Syrenko3 , A.G. Men′shikov1, A.V. Zvyagolskiy1

1National Technical University «Kharkiv Polytechnic Institute», 2, Kyrpychov Str., 61002 Kharkiv, Ukraine

2OPTEC LLC , 8, Ilyinskaya Str., 04070 Kyiv, Ukraine

3Kharkiv Machine-Building College, 79, Plekhanivska Str., 61068 Kharkiv, Ukraine 

Е-mail [email protected]
Issue Volume 10, Year 2018, Number 3
Dates Received 19 April 2018; published online 25 June 2018
Citation O.V. Sobol, R.P. Mygushchenko, А.А. Postelnyk, et al., J. Nano- Electron. Phys. 10 No 3, 03009 (2018)
PACS Number(s) 64.75.St, 81.07.Bc, 62.25. – g, 61.05.cp, 61.82.Rx
Keywords Structural engineering, Nanoscale (4) , Multiperiod coating, Structural state, Texture axis, Superhard.

The effect of the MeN (Me-Cr, Mo, Zr) layer composition in multi-period vacuum-arc (TiAlSi) N / MeN coatings with a nanoscale layer thickness on the predominant orientation of crystallite growth in layers and hardness was studied. It was found that phases with a cubic crystal lattice (structural type NaCl) in the layers of all types (TiAlSi)N/MeN coatings are formed, although for the MoN phase under equilibrium conditions a hexagonal crystal lattice is preferred. The interrelation between the structure of MeN and (TiAlSi)N layers is revealed, as well as the effect of the structural state on the coating hardness. Defining influence of the MeN layer on the formation of three structural states types was found: with a preferential crystallite growth with the texture axis [111]; with the texture axis [100]; the formation of a non-textured state. The highest hardness of 47.8 GPa was achieved in the (TiAlSi)N/ZrN multilayer coating with the texture axis [111].

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