Synthesis of Copper Nanoparticles by Cathode Sputtering in Radio-frequency Plasma

Authors Zh.T. Nakysbekov1, M.Zh. Buranbayev1, M.B. Aitzhanov1, G.S. Suyundykova1 , M.T. Gabdullin1,2

1Al-Farabi Kazakh National University, 71, Al-Farabi Ave., 050040 Almaty, Kazakhstan

2Kazakh-British Technical University, 59, Tole bi Str., 050000 Almaty, Kazakhstan

Е-mail [email protected]
Issue Volume 10, Year 2018, Number 3
Dates Received 05.04.2018; published online 25.06.2018
Citation Zh.T. Nakysbekov, M.Zh. Buranbayev, M.B. Aitzhanov, et al., J. Nano- Electron. Phys. 10 No 3, 03010 (2018)
PACS Number(s) 81.10.Bk, 61.46. + w
Keywords Copper (8) , Copper nanopowder (2) , Nanoparticles (70) , PVD method, RF plasma, Synthesis (27) , Cathode sputtering.

The paper describes the design features of the synthesis of copper nanoparticles by the cathode sputtering method in radio-frequency plasma. The dependence of the size and number of Cu nanoparticles on the plasma power, sputtering time, gas flow and pressure was studied. Optimal parameters for obtaining copper particles with an extended fractal structure were determined.

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