Small-scale Vacuum System for Deposition of Multilayer Metallic Films“MVU TM – Magna 3M”

Authors V.V. Odinokov, G.Ya. Pavlov, V.V. Panin, V.P. Raschinsky, A.N. Shpakov, A.V. Shubnikov

JSC “Research Institute of Precision Machine Manufacturing” (JSC NIITM), 10, Panfilovsky Pr., 124460 Zelenograd, Moscow, Russia

Issue Volume 6, Year 2014, Number 3
Dates Received 19 May 2014; published online 15 July 2014
Citation V.V. Odinokov, G.Ya. Pavlov, V.V. Panin, et al., J. Nano- Electron. Phys. 6 No 3, 03015 (2014)
PACS Number(s) 81.15.Cd, 52.77.Dq, 52.50. – b
Keywords Vacuum system, Magnetron sputtering (14) , Thin film deposition, Multilayer metallic coatings.
Annotation A new small-scale vacuum system “MVU TM-Magna 3M” developed at JSC “Research Institute of Precision Machine Manufacturing” is described. Its assembly and working conditions are considered. This system was used for magnetron sputtering multilayer metallic films.

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