An Improved SPICE Model for MEMS Based Capacitive Accelerometers

Authors C. Kavitha, M. Ganesh Madhan

Department of Electronics Engineering, Anna University, M.I.T Campus, 600 044 Chennai, India

Issue Volume 5, Year 2013, Number 2
Dates Received 15 February 2013; revised manuscript received 29 April 2013; published online 04 May 2013
Citation C. Kavitha, M. Ganesh Madhan, J. Nano- Electron. Phys. 5 No 2, 02011 (2013)
PACS Number(s) 85.85. + jх
Keywords Squeezed film, Capacitive accelerometer, Thermal effect, Damping, Electrical attractive force.
Annotation An improved electrical equivalent circuit for a capacitive MEMS accelerometer, incorporating temperature, pressure and squeezed film effects is reported. The circuit model corresponds to a single degree of freedom (SDOF) vibrating system, including dominant micro physical mechanisms. Static, transient and frequency response analysis are carried out at temperature and pressure ranges of 100 K to 400 K and 30 to 3000 Pa respectively. The effect of these parameters on the resonance frequency, peak displacement and settling time of the accelerometer are determined. Simulations are performed using PSpice® circuit simulator.

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