Pull-in Voltage Analysis of Fixed-Fixed Beam and U-Shape Cantilever MEMS Actuators: A Comparative Finite Element Study
| Authors | Priyanka Gupta1, Vijay Gautam1, Bijendra Prasad1, Pankaj Sharma2 |
| Affiliations |
1Delhi Technological University, New Delhi, India 2Guru Tegh Bahadur Institute of Technology, New Delhi, India |
| Е-mail | vijaygautam@dce.ac.in |
| Issue | Volume 18, Year 2026, Number 5 |
| Dates | Received 24 April 2026; revised manuscript received 20 October 2026; published online 28 October 2026 |
| Citation | Priyanka Gupta, Vijay Gautam, et al., J. Nano- Electron. Phys. 18 No 5, 05015 (2026) |
| DOI | https://doi.org/10.21272/jnep.18(5).05015 |
| PACS Number(s) | 07.05.Tp, 85.85. + j |
| Keywords | MEMS actuator, Pull-in voltage (2) , Fixed-fixed beam, U-shape cantilever, von Mises stress, Electrostatic actuation, COMSOL Multiphysics, Finite element analysis. |
| Annotation |
This study presents a systematic coupled electromechanical finite element investigation of eighteen MEMS actuator configurations in COMSOL Multiphysics, covering two geometries (fixed-fixed beam and U-shaped cantilever), three structural materials (Au, Mo, W), and three beam lengths (100, 150, 230 m). For each case, parametric voltage sweeps deliver pull-in voltages, displacement and von Mises stress versus voltage, full arc-length spatial profiles, and 3D volumetric field renderings at near-pull-in conditions. Pull-in voltages range from 0.68 V to 11.5 V and confirm E1/2 modulus and L − 3/2 length scaling laws. The U-shape geometry yields a 14 to 50 % voltage lift over the fixed-fixed beam, growing with arm length. Three-dimensional COMSOL maps identify anchor-junction and bridge-corner fatigue hot spots invisible to 1D analysis. Stress safety margins exceed 24 times in every case, confirming electromechanical instability as the universal failure mode. |
|
List of References |
Other articles from this number
1) Design and Simulation of Cobalt/Nickel Functionalized a-IGZO Thin-Film Transistor for Enhanced Gas Sensing Applications [05001-1-05001-8]2) Implementation of Novel 3D Printed Perturb Microwave Laminate with Circular Mesh Grid Substrate for Circularly Polarized Patch Antenna [05002-1-05002-7]
3) Local Laser-Enhanced Nickel Electrodeposition [05003-1-05003-5]
4) Theoretical Aspects and Engineering Approaches to Energy-Saving Liquid Atomization Technologies [05004-1-05004-8]
5) Effect of Magnesium Doping on the Dielectric Property and Triboelectric Performance of Nanohydroxyapatite [05005-1-05005-7]
6) Frequency-Tunable Acousto-Electronic Devices [05006-1-05006-3]
7) Benchmarking Performance of a Double Gate CNTFET Against the GNRFET with Schottky Contact [05007-1-05007-5]
8) Analysis of Nano-Scale Effects on the Vibration of Functionally Graded Plates Using a Higher-Order Shear Deformation Theory [05008-1-05008-5]
9) Temperature-Dependent Spectral Characteristics of AlGaInP Quantum-Well Light-Emitting Diodes [05009-1-05009-5]
10) Impact of Active and Passive Cooling on Photovoltaic Modules Performance’s [05010-1-05010-5]
11) Structural and Electrical Characterization of Different Grades of Polyolefin Encapsulants [05011-1-05011-4]
12) Development of Radio-Absorbing Ceramics Based on SrO–BaO–TiO2–SiO2 System Compositions [05012-1-05012-6]
13) Structural, Optical, and Dielectric Properties of Zinc Oxide Thin Films Obtained by Impedance Spectroscopy [05013-1-05013-5]
14) Synthesis and Characterization of CuCr1.4Co0.6O4 Spinel Nanostructures: Impact of Cobalt Doping on Optical and Photocatalytic Properties [05014-1-05014-9]
15) Numerical Modeling of the Thermal Behavior of Thin Layers – Application to a Brazed Insert Assembled into a Cutting Tool [05016-1-05016-5]
16) Performance Enhancement of an InAs Source/Pocket Dual-Source Trench Gate Tunnel Field-Effect Transistor Using an HfO2 Filled Cavity: A TCAD Investigation [05017-1-05017-4]
17) AI-Augmented Geometry Evolution for a Wideband Slotted Radiator Antenna for 5G N78 Applications [05018-1-05018-5]
18) Analysis of A Low-Profile Circular Slotted BPF For 5G New Radio Applications [05019-1-05019-4]
19) Flexible Antenna Design for Wearable and RF Energy Harvesting in the Mid-Band Wireless Spectrum [05020-1-05020-11]
20) Performance Assessment of Recycled Polymer Composites with Multi-Walled Carbon Nanotubes [05021-1-05021-6]
21) Dual-Band Microstrip Patch Antenna with R-SRR Meta-Surface for 5G-NR Applications [05022-1-05022-4]
22) Microstrip Patch Antenna with Parasitic Elements and Slots for Narrow Bandwidth for Modern Wireless Applications [05023-1-05023-5]
23) Design and Analysis of a High Gain Dual Band Symmetric Slot Microstrip Patch Antenna Using 5CB Nano Doped NLC for S- and Ku- Band Applications [05024-1-05024-5]
24) Analysis of a Low-Profile Electrically Small Circular Slotted Circular Patch Antenna for Bluetooth Applications [05025-1-05025-5]
25) Moth Flame Optimization with Random Forest Surrogate Modeling for Side Lobe Suppression in Linear Antenna Arrays [05026-1-05026-5]
26) Spectral Dependence of the Effective Photoconductivity of Crystalline Silicon Containing Amorphous Inclusions of Different Morphologies [05027-1-05027-8]
27) Nanotechnology-Integrated Imaging Framework for Brain Tumor Classification [05028-1-05028-4]
28) An Analytical Approach of Threshold Voltage Model in Junctionless Field Effect Transistor with Hexagonal Shaped Cross-section [05029-1-05029-6]
29) A Compact Octagonal Shaped Antenna for ISM Band Applications [05030-1-05030-5]
30) Effect of Temperature on Dielectric and Impedance Characteristics of Graphene Oxide Thin Films [05031-1-05031-5]
31) Nanoscale Electronic and Surface Property Engineering of Pt Nanomaterials by Rare-Earth Praseodymium for Energy Application [05032-1-05032-5]
32) Application-Specific Thickness Optimization for Organic Solar Cells Under Indoor and Outdoor Conditions [05033-1-05033-9]
33) EBG-Integrated Quad-Band Decagonal Slitted Microstrip Patch Antenna for 5G Wireless Systems [05034-1-05034-7]
34) Strengthening the Inner Surfaces of Long Holes in VT22 Titanium by Glow Discharge Nitriding [05035-1-05035-7]
35) Light Emitters Based on ZnO:Mg Heterolayers [05036-1-05036-5]
