Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings

Автори I.V. Sudzhanskaya1, А.I. Poplavsky1, I.Yu Goncharov1, O.V. Glukhov2
Приналежність

1 Belgorod State University, 85, Pobedy Str., 308015 Belgorod, Russia

2 National University of Radioelectronics, 14, Science Boulevard, 61166 Kharkov, Ukraine

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Випуск Том 9, Рік 2017, Номер 6
Дати Одержано 15.09.2017, опубліковано online - 24.11.2017
Посилання I.V. Sudzhanskaya, А.I. Poplavsky, I.Yu Goncharov, O.V. Glukhov, J. Nano- Electron. Phys. 9 No 6, 06027 (2017)
DOI 10.21272/jnep.9(6).06027
PACS Number(s) 68.55.aj, 68.37.Ps
Ключові слова Carbon films, Electrical capacity, Conductivity (43) , Morphology surface.
Анотація Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance spectroscopy was obtained results change of electrical capacitance of parameters obtained carbon films. Morphology of surface produce by scanning probe microscopy methods was investigated. Determine correlation dependence between electrical capacity of carbon films and morphology surface against condition theirs obtainment. The explanation of the obtained results was proposed.

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