Investigation of the Structural, Electrical and Corrosion Properties of NbN Films Deposited by Magnetron Sputtering (DC Power Supply) Technique at Different Power
| Authors | B. Abdallah, M. Kakhia, W. Alssadat, W. Zetoune |
| Affiliations |
Department of Physics, Atomic Energy Commission of Syria(AECS), P.O. Box 6091, Damascus, Syria |
| Е-mail | pscientific27@aec.org.sy |
| Issue | Volume 13, Year 2021, Number 6 |
| Dates | Received 13 November 2021; revised manuscript received 18 December 2021; published online 20 December 2021 |
| Citation | B. Abdallah, M. Kakhia, W. Alssadat, W. Zetoune, J. Nano- Electron. Phys. 13 No 6, 06032 (2021) |
| DOI | https://doi.org/10.21272/jnep.13(6).06032 |
| PACS Number(s) | 74.25.Ld, 81.15.Fg, 82.45.Bb, 81.10.Aj |
| Keywords | NbN film, Power effect, Structural (40) , Corrosion (2) , Electrical Characterization. |
| Annotation |
This study aims to deposit niobium nitride (NbN) thin films on stainless steel (SS304) and silicon (100) substrates using direct current (DC) magnetron sputtering method at different power (varied from 100 to 150 W). The film structure is analyzed by X-ray diffraction (XRD); the patterns show that the films possess a (111) preferred orientation, corresponding to the cubic structure phase. Rutherford elastic backscattering (RBS) and energy dispersive X-ray (EDX) are used to investigate the composition of the prepared films. Surface morphology of the films is explored by scanning electron microscopy (SEM) and atomic force microscopy (AFM) images. AFM images clarify modifications of the morphology, especially roughness versus increased power, where roughness decreased with increasing thickness as well as power. Corrosion and microhardness performances of the films are related and assigned to the crystallinity of samples, which varies with power. Corrosion resistance of NbN films associated with SS304 substrates is improved. These attractive results may allow to use our films in the field of medical tools or equipment (equivalent to saline serum media). Electrical measurements (C-V and I-V) of films deposited at a power of 100 W confirm the potential electrical applications of NbN films deposited by DC sputtering method. |
|
List of References |
Other articles from this number
1) Deep Impact of the n-c-Si Defect Density on Heterojunction with Intrinsic Thin Layer Solar Cells [06001-1-06001-4]2) Comparative Study of the Influence of c-Si:H, a-Si:H, pm-Si:H and c-SiOx as a Passivation Layer on the Performance of HIT n-c-Si Solar Cells [06002-1-06002-4]
3) Enhanced Humidity Sensing Properties of Surfactant-Free Hydrothermally Synthesized Tin Oxide Nanoparticles [06003-1-06003-5]
4) Modeling and Simulation of MOSFET (High-k Dielectric) Using Genetic Algorithms [06004-1-06004-5]
5) Design and Analysis of a High-Performance Capsule-Shaped 2D-Photonic Crystal Biosensor: Application in Biomedicine [06005-1-06005-6]
6) Comparative Study of Thermal and Optical Properties of PANI Based Binary Nanocomposites [06006-1-06006-4]
7) Comparative Analysis of the Electrical Properties of Nanocrystalline NiMoO4 Hydrate and α-NiMoO4 Obtained by Hydrothermal Method [06007-1-06007-6]
8) Hydrogen Treatment of SPR Film Sensors: Experiments and Theoretical Modeling [06008-1-06008-5]
9) The Ag Influence on the Surface States of TiO2, Optical Activity and Its Cytotoxicity [06009-1-06009-5]
10) Distribution of Excess Charge Carriers in Bilateral Macroporous Silicon with Different Thicknesses of Porous Layers [06010-1-06010-5]
11) Si- and Ge-FinFET Inverter Circuits Optimization Based on Driver to Load Transistor Fin Ratio [06011-1-06011-4]
12) On the Time Resolved Optogalvanic Spectroscopy of Neon in a Hollow Cathode Discharge [06012-1-06012-6]
13) Effect of the Content of Molybdenum Disilicide on the Microstructure and Phase Transformations of ZrB2-MoSi2-10Al Coatings upon Annealing in Air [06013-1-06013-4]
14) Optical Properties of ZnO Thin Film: A Simulation Study for Optoelectronic Applications [06014-1-06014-4]
15) Features of Photoelectric Processes in CdS/CdTe Thin Film Heterosystems with Nanoscale Layers in Back Contacts [06015-1-06015-6]
16) A Comparative Study on the Optoelectronic Performance of Undoped, Mg-doped and F/Mg Co-doped ZnO Nanocrystalline Thin Films [06016-1-06016-6]
17) Comparative Study and Characterization of Reduced Graphene Oxide (RGO) and Porous Reduced Graphene Oxide (P-RGO) Based on Coconut Shell Waste [06017-1-06017-6]
18) Effect of Reinforcing Particle Shape on the Behavior of Composites Materials [06018-1-06018-4]
19) Superparamagnetism in Si1 – xGex (B, Hf) Whiskers [06019-1-06019-5]
20) Topological Analysis of the Effect of Annealing on the Grain-Boundary Structure of Polysilicon Films [06020-1-06020-4]
21) Electrochemical Properties of Hybrid Supercapacitors Formed Based on Nanoporous Carbon and Nickel Tungstate [06021-1-06021-5]
22) Experimental Data on Dynamic Changes of Radio Pulses When They are Emitted by Piezoceramic Electromechanical Transducers [06022-1-06022-5]
23) Iron-Doped Titania: Synthesis, Structural, Magnetic and Photocatalytic Properties [06023-1-06023-7]
24) Properties of Amorphous Silica Synthesized from Copper-Smelting Slags [06024-1-06024-6]
25) Strengthening Mechanisms in the Surface Layer of Duralumin Modified by a High Current Pulsed Relativistic Electron Beam [06025-1-06025-6]
26) Analysis of Mechanisms to Increase the Industrial Silicon Solar Cell Efficiency [06026-1-06026-8]
27) Numerical Analysis of the Nanoparticle Dynamics in a Viscous Liquid: Deterministic Approach [06027-1-06027-5]
28) Energy and Frequency Properties of Planar n+-n-n+ Diodes with Active Side Boundary [06028-1-06028-4]
29) Methods for Calculating the Transfer Functions of Broadband Plate Piezoelectric Transducers with Transition Layers [06029-1-06029-6]
30) Evaluation of Device Fabrication from FET to CFET: A Review [06030-1-06030-8]
31) Analysis of Crosstalk Noise Using Graphene Nanoribbon Interconnects by Changing Wire Spacing and Electron Mean Free Path [06031-1-06031-4]
32) Optical Properties of CuSCN/Stilbazolium Dye Hybrid Thin Films [06033-1-06033-4]
33) Performance Analysis of Gate All Around (GAA) MOSFET at Cryogenic Temperature for the Sub-Nanometer Regime [06034-1-06034-4]
34) Study and Design of Printed Rectangular Microstrip Antenna Arrays at an Operating Frequency of 27.5 GHz for 5G Applications [06035-1-06035-5]
35) Influence of the Angle of Incident Light on the Performance of Textured Silicon Solar Cells [06036-1-06036-5]
