Practice Aspects of Deposition of Nanostructured Composite NaCl-Fe Films by EB-PVD on a Rotating Substrate

Authors V.O. Osokin1, Yu.A. Kurapov1, Ya.A. Stel’makh1, P.O. Shpak2

1Paton Institute for Electric Welding, NASU, 11, Kazimir Malevich St., 03150 Kyiv, Ukraine

2Institute for Carbon Nanomaterials, Ltd., office 110, build. 2, Khmelnitske St., 21036 Vinnitsa, Ukraine

Issue Volume 13, Year 2021, Number 5
Dates Received 26 July 2021; revised manuscript received 20 October 2021; published online 25 October 2021
Citation V.O. Osokin, Yu.A. Kurapov, Ya.A. Stel’makh, P.O. Shpak, J. Nano- Electron. Phys. 13 No 5, 05011 (2021)
PACS Number(s) 81.15.Jj, 81.05. – t
Keywords Nanomaterial (4) , EB-PVD, Structure (104) , Rotating substrate.

EB-PVD combines the feasibility of controlled intensive evaporation of nonorganic materials in vacuum with subsequent deposition of vapor on the substrate/product. This method is characterized by wide capabilities of various technological setups and precise control of technological process parameters. The paper considers peculiarities of the EB-PVD technological setup for obtaining nanostructured NaCl-Fe materials for medical applications. A technological setup with a peripheral to the substrate rotation axis arrangement of vapor sources is employed. The use of a disk with a complex of inclined vapor channels on a vapor source ensures a uniform thickness distribution of thick NaCl films along a rotating substrate with an average thickness deviation of ± 5 %. The geometric ratio of the directions of vapors of source materials on a rotating substrate allows to obtain qualitative nanostructured NaCl-Fe materials. The relative deviation of the concentration of the metal component does not exceed 8-10 %. The peripheral arrangement of vapor sources made it possible to reduce the distance between the sources of evaporating materials and the substrate deposition surface to 230 mm. Thus, an increase in the film thickness up to 300-400 μm is achieved. The structure of composite NaCl-Fe films by EB-PVD on a rotating substrate is an alternation of NaCl and Fe enriched layers of different thickness that depends on the rotation speed of the substrate. An increase in the substrate rotation speed decreases the thickness of the deposited film layers. The results of X-ray phase analysis of the deposited composite NaCl-Fe films reveal that Fe in the form of magnetite oxide Fe3O4 (FeO∙Fe2O3) is included in the NaCl matrix. The size of the obtained Fe3O4 crystallites in the analyzed composite NaCl-Fe films, obtained on a rotating substrate for an Fe content of 16.4-19.0 %, does not change with the thickness of the Fe layers and is 8 ± 1 nm. The presented results of experimental studies demonstrate the effective application of EB-PVD for obtaining various composite nanomaterials on rotating substrates.

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