The Raman Diagnostics of Carbon Films Obtained by Electron-beam Deposition on Cu, Al and Ni Substrates

Authors V.O. Osokin1, V.О. Panibratskiy3, Y.A. Stelmakh1, P.O. Shpak3, V.O. Yukhimchuk2

1Paton Institute for Electric Welding, NASU, 11, Kazimir Malevich St., 03150 Kyiv Ukraine

2Lashkaryov Institute for Semiconductor Physics, NASU, 41, Nauky St., 03028 Kyiv Ukraine

3Institute for Carbon Nanomaterials, Ltd., Office 110, 2, Khemelnitske St., 21036 Vinnytsia, Ukraine

Issue Volume 13, Year 2021, Number 2
Dates Received 14 February 2021; revised manuscript received 15 April 2021; published online 20 April 2021
Citation V.O. Osokin, V.O. Panibratskiy, et al., J. Nano- Electron. Phys. 13 No 2, 02023 (2021)
PACS Number(s) 42.55.Ye, 68.55.Pg
Keywords Carbon (56) , Electron-beam deposition, Raman spectroscopy (18) , Structure (105) .

Results of studies by Raman spectroscopy of the structural features of carbon films obtained by electron-beam physical vapor deposition (EB-PVD) of graphite vapor flow depending on the substrate material (Cu, Al, Ni) and the deposition time are described in this paper.Different carbon microstructures are effectively formed in a wide range of conditions, therefore, various methods and approaches are used in their synthesis. A feature of the method used by the authors for obtaining carbon films is a significant (by an order) intensification of the evaporation process of graphite by using an intermediate bath of molten tungsten. Molten tungsten has higher temperature and lower vapor elasticity compared to carbon and provides an intense and uniform carbon vapor flow. Above the crucible from which carbon evaporates, tungsten plates are placed, which serve as a reflector of the vapor flow oriented in a plane at an angle of 45, that ensure maximum reflection of evaporated carbon on foil substrates made of different materials (Ni, Cu and Al). The substrate material has a significant influence on the phase composition and structure of the deposited carbon films. The Raman spectra of carbon films deposited on aluminum and copper substrates are similar, and the structural parameters of the resulting carbon films do not differ significantly depending on the substrate material. Among the analyzed carbon films, the most advanced with the least number of structural defects are the films obtained by deposition of the vapor flow on nickel substrates.The results of the study confirm the possibility of graphene obtaining by EB-PVD of graphite evaporation through an intermediate bath of molten tungsten and subsequent condensation of the reflected flow on substrates made of the selected materials.

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