Structural Engineering Multiperiod Coating ZrN/MoN

Authors O.V. Sobol′1 , A.A. Meylekhov1 , V.A. Stolbovoy2 , A.A. Postelnyk1

1National Technical University «Kharkiv Polytechnic Institute», 21, Kyrpychova st., Kharkiv, Ukraine

2National Science Center Kharkov Institute of Physics and Technology, 1, Akademicheskaya St., 61108 Kharkiv, Ukraine

Issue Volume 8, Year 2016, Number 3
Dates Received 15 June 2016; published online 03 October 2016
Citation O.V. Sobol′, A.A. Meylekhov, V.A. Stolbovoy, A.A. Postelnyk, J. Nano- Electron. Phys. 8 No 3, 03039 (2016)
DOI 10.21272/jnep.8(3).03039
PACS Number(s) 52.77.Dq, 81.07.Bc, 61.05.cp, 61.82.Rx,
Keywords Multilayer coating ZrN/MoN, The thickness of the layers, The bias potential, Structure (102) , Crystallite nanosize, Hardness (11) .

Using the method of structural engineering by changing the thickness of the layers in a multiperiod ZrN/MoN system investigated the effect of the phase-texture state of the crystallites and their size on the hardness of the vacuum-arc coating. Is revealed a determining influence on the formation of ZrN layers preferential orientation growth [100] axis with a small layer thickness 7-20 nm (the deposition of 3 to 10 seconds). At high layer thickness determines the texture [311] crystallites are -Mo2N phase formed in the Mo-N layers. Pulsed high-voltage stimulation without changing the type of structural states for different layer thicknesses, leads to partial disorientation texture in thick layers. Hardness of coating with thick (80 nm) layers is 35-37 GPa. In small thickness layers pulse stimulation of atoms motility causes the formation of a planar structure with an average crystallite size of 4-9 nm in the layers, which is accompanied by increased hardness of up to 44 GPa.

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