Thermodynamics of Nucleation of Silicon Carbide Nanocrystals during Carbonization of Porous Silicon

Authors Yu.S. Nagornov
Affiliations

Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany

Е-mail [email protected]
Issue Volume 8, Year 2016, Number 3
Dates Received 14.04.2016; published online 03 October 2016
Citation Yu.S. Nagornov, J. Nano- Electron. Phys. 8 No 3, 03001 (2016)
DOI 10.21272/jnep.8(3).03001
PACS Number(s) 82.60.Nh, 81.07.Bc, 64.70.Nd
Keywords Thermodynamics of nucleation, SiC nanocrystals, High-temperature carbonization, Porous silicon (3) , Monte Carlo simulation (3) .
Annotation The formation of SiC nanocrystals of the cubic modification in the process of high-temperature carbonization of porous silicon has been analyzed. It has been shown that the surface energy of silicon nanoparticles and quantum filaments is released in the process of annealing and carbonization. The Monte Carlo simulation has shown that the released energy makes it possible to overcome the nucleation barrier and to form SiC nanocrystals.

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