Review of MEMS Test Structures for Mechanical Parameter Extraction

Authors A. Sharma1, M. Kaur1, D. Bansal1, D. Kumar2 , K. Rangra1

1 Central Electronics Engineering Research Institute/Council of Scientific & Industrial Research (CEERI/CSIR), Sensors and Nanotechnology Group, Pilani 333031, Rajasthan, India

2 Department of Electronics Sciences, Kurukshetra University, Kurukshetra 136119, Haryana, India

Issue Volume 3, Year 2011, Number 1, Part 2
Dates Received 04 February 2011, in final form 03 May 2011, published online 08 May 2011
Citation A. Sharma, M. Kaur, D. Bansal, et al., J. Nano- Electron. Phys. 3 No1, 243 (2011)
PACS Number(s) 85.85. – j, 62.40. – i
Keywords Mems test structures, Residual stress, Stress gradient, Young’s modulus (3) , Poisson ratio, Pull-in voltage.
This paper reviews the recent progress in MEMS test structures for mechanical parameter extraction. MEMS test structures reviewed include cantilevers, fixed-fixed beams, bent-beam, guckel rings, pointers, circular diaphragm, and lancet structures. Important mechanical and process parameters are highlighted, as they have significant contributions to the performance of MEMS devices. The challenges and statues of the test structures are outlined and discussed.

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