ZnO Growth on Macroporous Si Substrates by HF Magnetron Sputtering

Authors	V.V. Kidalov¹, A.F. Dyadenchuk², Yu.Yu. Bacherikov³, I.V. Rogozin¹, Vitali V. Kidalov¹
Affiliations	¹Berdyansk State Pedagogical University, 4, Shmidt St., 71100 Berdyansk, Ukraine ²Dmytro Motornyi Tavria State Agrotechnological University, 18, B. Khmelnitsky Ave., 72312 Melitopol, Ukraine ³V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, 41, Nauky Prosp., 03028 Kyiv, Ukraine
Е-mail
Issue	Volume 12, Year 2020, Number 3
Dates	Received 10 February 2020; revised manuscript received 15 June 2020; published online 25 June 2020
Citation	V.V. Kidalov, A.F. Dyadenchuk, Yu.Yu. Bacherikov, et al., J. Nano- Electron. Phys. 12 No 3, 03016 (2020)
DOI	https://doi.org/10.21272/jnep.12(3).03016
PACS Number(s)	78.30.Fs, 78.55.m, 61.43.Gt, 81.65.Cf
Keywords	Porous-Si, ZnO films, Method of HF magnetron sputtering.
Annotation	It is the purpose of this work to research the formation process of zinc oxide by the method of HF magnetron sputtering on silicon substrates of orientation (100) with the previously applied system of macropores. Samples of porous silicon were obtained by electrochemical etching. n-type Si (100) wafers were used. Precipitation of thin ZnO films was carried out in an RF discharge in an argon atmosphere with oxygen by sputtering a zinc target. The target had a diameter of 80 mm and a thickness of 6 mm. The deposition time was 1200 s. The pressure in the growth chamber was maintained at a level of 10 – 3 Pa. The substrate temperature was fixed at 300 °C. X-ray examination of ZnO has shown that the films have a polycrystalline nature with a wurtzite-type structure and hexagonal phase. ZnO crystallites in the coatings are highly oriented along the c-axis and perpendicular to the substrate surface. The lattice constant along the crystallographic c-axis of ZnO film was 5.2260 Å. The average crystallite size calculated by the Selyakov-Scherrer formula was 12 nm. According to SEM, grain size was ~ 50-100 nm. These discrepancies are explained by the presence of microstrains in the atomic matrix of the sample, as well as instrumental factors. The microelement analysis revealed practically perfect stoichiometry of ZnO grown on porous-Si/Si.
	List of References Full text download English version of article

Other articles from this number

1) Beam and Sector Modes of Electron Fluxes in Cylindrical Magnetic Field of Magnetron Gun [03001-1-03001-5]
2) Theoretical Investigation on Improvement of CIGS-based Solar Cells [03002-1-03002-5]
3) Enhancement of Performance of a-Si:H Solar Cells by Introducing a p-nc-SiOx:H Nanostructure Buffer Layer [03003-1-03003-5]
4) Optical Extraction Efficiency for External Cavity Quantum Cascade Lasers [03004-1-03004-5]
5) Numerical Simulation of FinFET Transistors Parameters [03005-1-03005-4]
6) Numerical Simulation of Temperature and Electric Field Distributions in the Microwave Heating of Petroleum Coke [03006-1-03006-5]
7) Nanostructured ZnO and CuI Thin Films on Poly(Ethylene Terephthalate) Tapes for UV-Shielding Applications [03007-1-03007-8]
8) Mechanisms of Changing the Conductivity of Porous Silicon in an Ammonia Atmosphere – DFT Modeling [03008-1-03008-7]
9) Elaboration of Copper Zinc Ferrite Nanoparticles: Application in Catalytic Wet H2O2 Oxidation of Phenol [03009-1-03009-5]
10) Characterization of Spin Coated Tin Oxide Thin Films for Optoelectronic Applications [03010-1-03010-5]
11) Investigation on Electrical and Structural Properties of Manganese Dioxide Nanoparticles [03011-1-03011-5]
12) On Temperature Dependence of Longitudinal Electrical Conductivity Oscillations in Narrow-gap Electronic Semiconductors [03012-1-03012-5]
13) Influence of Laser Radiation on Optical Properties of High Resistivity CdTe Crystals and Cd1 – xZnxTe Solid Solutions in the Field of the Fundamental Optical Transition E0 [03013-1-03013-4]
14) Electric Properties of MCM-41 SmCl3 Nanohybrid Encapsulate [03014-1-03014-5]
15) Deep Silicon Barrier Structure as Chemical Sensor for Detection of Hydrochloric Acid Salt Solutions [03015-1-03015-5]
16) Single Electron Transistor Based on Endohedral Metallofullerenes Me@C60 (Me = Li, Na, K) [03017-1-03017-5]
17) RMS Dynamic Displacements of Atoms and Their Complexes from the Equilibrium Position in Crystals [03018-1-03018-5]
18) Liquid Phase Deposition of TiO2 Films for Electron Transport Layer of Perovskite Solar Cells [03019-1-03019-5]
19) The Radiation Peculiarities of Nanoscale SnO2 in a Porous Matrix [03020-1-03020-4]
20) Modelling Spatial Characteristics of Silicon Solar Cell: Artificial Neural Network Approach [03021-1-03021-4]
21) Study of Coherent Properties of an Exciton in Semiconductor Quantum Dots [03022-1-03022-6]
22) Effect of Fe-incorporation on Structural and Optoelectronic Properties of Spin Coated p/n Type ZnO Thin Films [03023-1-03023-6]
23) Angular Ellipsometry of Porous Silicon Surface Layers [03024-1-03024-4]
24) Bioactive Polymer-apatite Coatings with Antimicrobial Properties on Model Titanium Implants [03025-1-03025-5]
25) Influence of Constant Magnetic Field on Mechanical Properties and Thermal Stability of the Amorphous Alloys Based on Co, Fe and Ni [03026-1-03026-4]
26) Optimization of the Electrical Characteristics of the Au/n-type InN/InP Schottky Diode Based on the Contact Technique of Different Diameters [03027-1-03027-6]
27) Green Function Method for Ferromagnetic Superlattice Nanotubes [03028-1-03028-4]
28) Hopping Conductivity Mechanism in Cd3As2 Films Prepared by Magnetron Sputtering [03029-1-03029-4]
29) Synthesis and Electrochemical Properties of Mesoporous α-MnO2 for Supercapacitor Applications [03030-1-03030-4]
30) Third-order Nonlinear Dispersion Properties of Surface Plasmon Resonance in Gold Nanoparticles [03031-1-03031-6]
31) Electroconductive and Polarization Properties of Inorganic-organic MCM-41 (PTHQ) Encapsulant [03032-1-03032-5]
32) Biosensors: Design, Classification and Application [03033-1-03033-9]
33) Electrical Conductivity and Magnetoresistive Properties of Film Alloys Based on Permalloy Fe0.5Ni0.5 and Copper [03034-1-03034-4]
34) The Influence of the Phase Composition of the B-N-C System Composite Material on Its Physical-mechanical and Tribological Characteristics [03035-1-03035-5]
35) Model of Tunneling Current on Bilayer Armchair Graphene Nanoribbon Tunnel Field Effect Transistor Using Transfer Matrix Method [03036-1-03036-5]
36) Investigation of the Electrophysical Influence on the Antiwear Properties of Hydrocarbon Liquids [03037-1-03037-6]
37) Calculation of Physicochemical Conditions of the Formation of Protective Coatings Based on Carbides and Nitrides of Chromium [03038-1-03038-4]
38) Structural and Phase Elemental Distribution in Pulsed Plasma Coating Deposited with Cemented Carbide Cathode [03039-1-03039-6]
39) Analysis of the Dynamic and Structural Characteristics’ Behavior in NaCl Single Crystals Pre-deformed and Х-ray Irradiated [03040-1-03040-3]