Basic Study of Mono-like Silicon Material Properties under Chemical Treatments: Comparison with Single and mc-Silicon

Authors G. Benseba1, A. Moussi2, S. Meziani2, D. Hocine1, M.S. Belkaid1

1Advanced Technologies Laboratory of Electrical Engineering (LATAGE), University Mouloud Mammeri ofTizi-Ouzou (UMMTO), BPN 17 R.P, Tizi Ouzou, Algeria

2DDCS Division, Research Center for Semiconductor Technology for Energy (CRTSE), Algeria, 02 Bd. Frantz Fanon, B.P 140 Alger –7 Merveilles –Algiers Algeria

Issue Volume 11, Year 2019, Number 5
Dates Received 07 May 2019; revised manuscript received 23 October 2019; published online 25 October 2019
Citation G. Benseba, A. Moussi, et al., J. Nano- Electron. Phys. 11 No 5, 05003 (2019)
PACS Number(s) 65.40.gk, 77.55.df, 81.40. – z
Keywords Mono-like (quasi-single crystalline) silicon, Physico-chemical properties, Chemical treatment, Analysis (25) , Texturing.

In this paper, we present the study of the silicon mono-like (ML-Si) material. Its physical and chemical properties are analyzed and compared to those of Czochralski-monocrystalline silicon (Cz-Si) and multicrystalline silicon (mc-Si). After chemical treatment of each material, the surface is analyzed by scanning electron microscopy (SEM) and X-ray diffraction (XRD). We observe that Cz-Si and ML-Si present the same morphology and crystallographic orientation. FTIR analysis shows an (interstitial) oxygen content of the same order for three materials but with values of ML-Si closer to that of mc-Si. Substitutional carbon concentration is intermediate for ML-Si between those of Cz-Si and mc-Si. Reflectivity of ML-Si is 5 % higher than that of Cz-Si and much lower than mc-Si surface after NaOH texture. Photoluminescence analysis indicates that ML-Si and Cz-Si materials present better homogeneity than mc-Si material. At the final, we present the advantages and drawbacks of ML-Si material with regard to Cz-Si and mc-Si. ML-Si has better material properties, having fewer grain boundaries and dislocations compared to mc-Si. In addition, containing a single grain allows a lower surface reflectance to be obtained by using alkaline texturing. We also find that ML-Si is almost identical to Cz-Si.

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