Tribotechnical Properties of (TiZr)N/(TiSi)N Multilayer Coatings with Nanometer Thickness

Authors V.M. Beresnev1 , S.V. Lytovchenko1 , D.V. Horokh1, B.O. Mazilin1, V.A. Stolbovoy1, 2 , I.N. Kolodiy2, D.A. Kolesnikov3, V.V. Grudnitsky2, P.A. Srebniuk1 , О.V. Glukhov4

1V.N. Karazin Kharkiv National University, 4, Svoboby Sq., 61000 Kharkiv, Ukraine

2National Scientific Centre “Kharkiv Institute of Physics and Technology”, 1, Akademichna St., 61108 Kharkiv, Ukraine

3Belgorod National Research University, 85, Pobedy St., 308015 Belgorod, Russia

4National University of Radio Electronics, 14, Science Boulevard, 61166 Kharkiv, Ukraine

Issue Volume 11, Year 2019, Number 5
Dates Received 27 April 2019; revised manuscript received October 2019; published online 25 October 2019
Citation V.M. Beresnev, S.V. Lytovchenko, D.V. Horokh, et al., J. Nano- Electron. Phys. 11 No 5, 05037 (2019)
PACS Number(s) 61.46.–w, 62.20.Qp, 62-65.–g
Keywords Vacuum arc deposition, Multilayer nitride coatings, Structure (104) , Friction coefficient, Hardness (12) .

The tribotechnical characteristics of (TiZr)N/(TiSi)N nitride multilayer coatings obtained by the method of vacuum-arc deposition at room temperature were investigated. The analysis of the influence of the deposition conditions on the mechanical and tribological properties of coatings with different modulation periods (total bilayer thickness) of this structure was carried out: in the 1st series about 20.4 nm, in the 2nd series with λ = ≈ 43.9 nm, and in the 3d series of samples the coating was formed with a thickness of λ ≈ 137 nm. The results of wear were investigated, and they indicate that multi-element nitride coatings wear out by abrasive mechanism. The intensity of wear in coatings with the number of layers 360 (period λ = 20.4 nm) is 2 times lower than in coatings of 89 layers (period λ = 137 nm). The values of the friction coefficient were 0.79-0.82 during tests. Coating hardness was HV0.05 = 37.6 GPa for the samples of series 1, HV0.05 = 31.2 GPa for the second series, and HV0.05 = 26.5 GPa for the samples of series 3.

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