Structure and Physicomechanical Properties of Superhard Multicomponent Multilayer (TiAlСrY/Zr)/(TiAlСrYN/ZrN) Coatings with Double Modulation Period of the Structure
| Authors | V.Yu. Novikov1 , V.M. Beresnev2 , D.A. Kolesnikov1 , O.N. Ivanov1 , S.V. Lytovchenko2 , O.V. Glukhov3, D.V. Gorokh2, A.O. Kozachenko1, E.V. Krytsyna1, V.V. Sirota4 |
| Affiliations |
1Belgorod State National Research University, 85, Pobiedy St., 308015 Belgorod, Russian Federation 2V.N. Karazin Kharkiv National University, 4, Svobody Sq., 61022 Kharkiv, Ukraine 3National University of radio electronics, 14, Nauki Boul., 61166 Kharkiv, Ukraine 4V.G. Shukhov Belgorod State Technological University, 46, Kostyukov St., 308012 Belgorod, Russian Federation |
| Е-mail | |
| Issue | Volume 11, Year 2019, Number 2 |
| Dates | Received 27 February 2019; revised manuscript received 08 April 2019; published online 15 April 2019 |
| Citation | V.Yu. Novikov, V.M. Beresnev, D.A. Kolesnikov, et al., J. Nano- Electron. Phys. 11 No 2, 02027 (2019) |
| DOI | https://doi.org/10.21272/jnep.11(2).02027 |
| PACS Number(s) | 68.55.Jk, 68.65.Ac |
| Keywords | Multilayer coatings, Structure modulation period, Microhardness (2) , Adhesive strength, Phase and elemental composition. |
| Annotation |
The paper describes the acquisition, establishment of mechanisms and patterns of formation of the phase composition and structure of multilayer coatings of the (TiAlСrY)N/ZrN system with a single and of the (TiAlCrY/Zr)/(TiAlСrY)N/ZrN systems with a double modulation period by vacuum-arc deposition. The targets were located along one straight line at equal distances from the perpendicular axis on which the substrates were placed. The rotation of the axis with the substrates was carried out either continuously or with a fixed delay at the evaporators. The coatings of both systems are distinguished by a high degree of laminarity of the layers. The (TiAlСrY)N/ZrN system coatings have a pronounced layered periodic structure in the entire coating volume. The modulation period (total thickness of the bilayer) of such a structure is about 30 nm. Two modulation periods are clearly visible in the (TiAlCrY/Zr)/(TiAlCrYN/ZrN) system coatings. One period approximately coincides with the modulation period of the samples of the (TiAlCrY/Zr)N system and is about 30 nm. The second modulation period is about 1.3 microns. It includes 48 bilayers. The influence of the partial pressure of nitrogen in the chamber on the nitrogen content in the coatings, their hardness and adhesive strength were studied. A significant increase in the hardness of 68.22 GPa and the adhesion strength of the coatings with a double modulation period of the structure was revealed. A fundamentally new technological approach to the process of obtaining multilayer coatings has been proposed. |
|
List of References |
Other articles from this number
1) Molecular Dynamics Modeling of Mechanical Properties of Nanocrystalline SiC [02001-1-02001-5]2) X-ray Investigation of SiC Nanostructure on Cu Films [02002-1-02002-4]
3) Effect of Au Dopant on the Structural and Optical Properties of ZnO Thin Films Prepared by CVD [02003-1-02003-4]
4) Performance Dependence of Organic Solar Cells as a Function of Active Layer Thickness, Luminous Intensity and Temperature of Thermal Annealing [02004-1-02004-5]
5) Initiation of the Explosive Crystallization Process in Amorphous Alloys of the Fe-Zr System by Pulse Laser Treatment [02005-1-02005-4]
6) Chalcopyrite Al(Ga, Mn)As2 and AlGa(As, P) Quaternary Semiconductor: A First-principle Study [02006-1-02006-5]
7) Electrical Properties of the Сu2O/Cd1 – xZnxTe Heterostructure [02007-1-02007-5]
8) Defect Pool Numerical Model in Amorphous Semiconductor Device Modeling Program [02008-1-02008-5]
9) Generation of Electromagnetic Oscillations of Submillimeter Range by GazIn1 – zAs Diodes Using Impact Ionization [02009-1-02009-5]
10) Effect of the Annealing Gas and RF Power Sputtering in the Electrical, Structural and Optical Properties of ITO Thin Films [02010-1-02010-7]
11) Channel Length Effect on Subthreshold Characteristics of Junctionless Trial Material Cylindrical Surrounding-Gate MOSFETs with High-k Gate Dielectrics [02011-1-02011-5]
12) Optical Properties of in-situ Chemically Synthesized PANI-TiO2 Nanocomposites [02012-1-02012-5]
13) Visualization of Signal Structure Showing Element Functioning in Complex Dynamic Systems – Cognitive Aspects [02013-1-002013-4]
14) Regularities of Influence of Electron-beam Technology Modes on the Performance Characteristics of Optical Elements [02014-1-02014-7]
15) DC, AC, and Transient Simulation Study of MEMS Cantilever [02015-1-02015-5]
16) Effect of Long-Range Passivation of Impurity Atoms by Surface Dangling Bonds on the Conductivity of Porous Silicon [02016-1-02016-8]
17) The Concentration Measurements of Tellurium Donor Impurity in Lamellar Bismuth Samples by the Time-of-Flight Mass Spectrometry Method [02017-1-02017-4]
18) Lattice Mechanical Properties of Alkaline Earth Metals Calcium and Strontium [02018-1-02018-7]
19) Spin-orbit Splitting of Valence Band in Silicon Whiskers under Strain [02019-1-02019-8]
20) Interrelation between Pyroelectricity and Residual Polarization in Thin Films of a Ferroelectric Polymer with Nanoscale Structure [02020-1-02020-5]
21) New Deconvolution Technique to Improve the Depth Resolution in Secondary Ion Mass Spectrometry [02021-1-02021-5]
22) Relativistic Correction of the Field Emission Current in the Fowler-Nordheim Formalism [02022-1-02022-6]
23) Calculation of Electron Mobility for the Strained Germanium Nanofilm [02023-1-02023-6]
24) A DFT Study of Hydrogen Adsorption on h-BN: Boron Doping Effects [02024-1-02024-5]
25) The Simultaneous Impacts of the p nc-SiOx:H Window Layer Band Gap and the Back Reflection on the Performances of a-Si:H Based Solar Cells [02025-1-02025-5]
26) Crystalline Structure and Physical Properties of High-Entropy Film Alloys [02026-1-02026-6]
27) Excitonic Properties of Perylene Diimide Based Dyes [02028-1-02028-3]
28) Formation and UV-Vis Studies of Lead Sulfide Nanoparticles [02029-1-02029-4]
29) Role of TCO Films in Improving the Efficiency of CdS/MoS2 Heterojunction Solar Cells [02030-1-02030-4]
30) Physical Features of Double Sided Diffusion of Lithium into Silicon for Large Size Detectors [02031-1-02031-4]
31) Interface Interaction as a Factor of Dielectric Properties of Epoxy-based Composites with Graphite Nanoplatelets [02032-1-02032-5]
32) Modelling of Vibration Sensor Based on Bimorph Structure [02033-1-02033-8]
