DC, AC, and Transient Simulation Study of MEMS Cantilever

Authors S.S. Khot1, A.A. Patil1, V.N. Mokashi2, P.P. Waifalkar3 , K.V. More4, R.K. Kamat2 , T.D. Dongale1

1Computational Electronics and Nanoscience Research Laboratory,School of Nanoscience and Biotechnology, Shivaji University, Kolhapur-416004, India

2Department of Electronics, Shivaji University, Kolhapur-416004, India

3Department of Physics, Shivaji University, Kolhapur-416004, India

4Department of Chemistry, Shivaji University, Kolhapur-416004, India

Е-mail tdd.snst@unishivaji.ac.in
Issue Volume 11, Year 2019, Number 2
Dates Received 17 October 2018; revised manuscript received 03 April 2019; published online 15 April 2019
Citation S.S. Khot, A.A. Patil, V.N. Mokashi, et al., J. Nano- Electron. Phys. 11 No 2, 02015 (2019)
DOI https://doi.org/10.21272/jnep.11(2).02015
PACS Number(s) 85.85. + j, 07.05.Tp
Keywords Micro-electro-mechanical system, Simulation (35) , Cantilever.

The present reports deals with the DC, AC, and transient simulation study of MEMS cantilever. The open-ended rectangular system is simulated in the present investigation. In the present case, we have varied the length of MEMS cantilever (platinum electrode) and studied its effect on the following cases: i) the effect of voltage on the capacitance and beam position (DC analysis), ii) time domain beam position, capacitance, and voltage (AC analysis), and iii) time domain beam position, capacitance, and voltage (transient analysis). The results suggested that the length of an active electrode of MEMS cantilever significantly affects the MEMS performance. In addition, the voltage of MEMS cantilever linearly increases with respect to time and it was found to be independent of the electrode length and dielectric materials, which were used in the considered system.

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