(TiZr)N/(TiSi)N Maitilayer Nanostructured Coatings obtained by Vacuum Arc Deposition
| Authors | S.V. Lytovchenko1 , B.А. Mazilin1, V.M. Beresnev1 , V.А. Stolbovoy2, M.G. Kovalyova3, Е.V. Kritsyna3, I.V. Kolodiy2, О.V. Glukhov4 , L.V. Malikov5 |
| Affiliations |
1V.N. Karazin Kharkiv National University, Kharkiv, Ukraine 2National Scientific Centre “Kharkiv Institute of Physics and Technology”, Kharkiv, Ukraine 3Belgorod National Research University, Belgorod, Russian Federation 4Kharkiv National University of Radio Electronics, Kharkiv, Ukraine 5Scientific Centre of Physical Technologies of the Ministry of Education and Science and National Academy of Science of Ukraine, Kharkiv, Ukraine |
| Е-mail | |
| Issue | Volume 10, Year 2018, Number 5 |
| Dates | Received 16 September 2018; revised manuscript received 22 October 2018; published online 29 October 2018 |
| Citation | S.V. Lytovchenko, B.А. Mazilin, V.M. Beresnev, et al., J. Nano- Electron. Phys. 10 No 5, 05041 (2018) |
| DOI | https://doi.org/10.21272/jnep.10(5).05041 |
| PACS Number(s) | 61.46. – w, 62.20.Qp, 62-65. – g |
| Keywords | Nitride coatings, Multilayer coating, Composition of elements, Structure (105) , Microhardness (2) , Adhesive strength. |
| Annotation |
The paper investigates the structure and properties of nanoscale multilayer coatings based on (TiZr)N and (TiSi)N produced by vacuum arc technique. Also, it provides an analysis of the impact of partial pressure of nitrogen on structural and phase state of coatings. The nitride phases are strongly textured, crystallographic planes (111) of most grains are oriented parallel to the surface. Dimensions of the coherent scattering regions and values of micro-distortions of the lattice have been calculated. The hardness of coatings reached 37.1 GPa, and the adhesion fracture load exceeds 150 N. The process technology ensures high uniformity of and a low defect rate in obtained coatings. |
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List of References |
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