Scandium-silicon Multilayer X-ray Mirrors with CrB2 Barrier LayersScSiCrB

Authors Yu.P.  Pershyn1, A.Yu. Devizenko1 , E.N. Zubarev1 , V.V. Kondratenko1 , D.L. Voronov2 , E.M. Gullikson2

1National Technical University “Kharkiv Polytechnic Institute, 2, Kyrpycheva Str., 61002 Kharkiv, Ukraine

2Advanced Light Source, Berkeley National Laboratory, 1, Cyclotron Road, MS 15R0217, Berkeley, CA 94720 USA

Issue Volume 10, Year 2018, Number 5
Dates Received 18 July 2018; revised manuscript received 24 October 2018; published online 29 October 2018
Citation Yu.P. Pershyn, A.Yu. Devizenko, E.N. Zubarev, et al., J. Nano- Electron. Phys. 10 No 5, 05025 (2018)
PACS Number(s), 61.43.Dq, 68.65.Ac, 41.50. + h, 07.85.Fv
Keywords Multilayer X-ray mirror, Interlayer, Barrier layer, Reflectivity (3) , Extreme ultraviolet.       .

Methods of X-ray reflectometry (  0.154 nm), cross-sectional transmission electron microscopy and reflectometry in the EUV region (  41-51 nm) were used to investigate the barrier properties of CrB2 layers 0.3-1.3 nm thick in Sc/CrB2/Si multilayer X-ray mirrors (MXMs) deposited by DC magnetron sputtering. It is shown that barrier layers of ~ 0.3 nm separate Sc and Si layers completely and prevent interacting the Sc and Si layers. Thinner chromium diboride layers interact with the matrix layers forming interlayers containing mostly ScB2 on the Si-on-Sc interfaces and CrSi2 on the Sc-on-Si ones. Scandium-silicon MXMs with barrier layers on the both interfaces are shown to retain high reflectivity at the wavelength of  ~ 47 nm.

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