Mathematical Models of Pressure and Microdisplacement Sensors Based on Electric Field Perturbation of the Surface Acoustic Waves

Authors M.F. Zhovnir , O.O. Oliinyk, L.D. Pysarenko

National Technical University of Ukraine "Kyiv Polytechnic Institute", 16/9, Polytechnique St., 03056 Kyiv-56, Ukraine

Issue Volume 8, Year 2016, Number 1
Dates Received 09 November 2015; published online 15 March 2016
Citation M.F. Zhovnir, O.O. Oliinyk, L.D. Pysarenko, J. Nano- Electron. Phys. 8 No 1, 01024 (2016)
DOI 10.21272/jnep.8(1).01024
PACS Number(s) 77.65.Dq, 64.60.Ej
Keywords Surface acoustic waves (SAW), Dispersion of the phase velocity of the wave, SAW oscillator, Microdisplacement and pressure sensor.
Annotation The paper describes the functional charts, mathematical models and metrological parameters estimation of microdisplacements and pressure sensors on the basis of the electric field perturbation of the surface acoustic waves (SAW), which are distributed on the surface of a piezoelectric

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